JPS5418933B2 - - Google Patents

Info

Publication number
JPS5418933B2
JPS5418933B2 JP11029672A JP11029672A JPS5418933B2 JP S5418933 B2 JPS5418933 B2 JP S5418933B2 JP 11029672 A JP11029672 A JP 11029672A JP 11029672 A JP11029672 A JP 11029672A JP S5418933 B2 JPS5418933 B2 JP S5418933B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11029672A
Other languages
Japanese (ja)
Other versions
JPS4968801A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11029672A priority Critical patent/JPS5418933B2/ja
Publication of JPS4968801A publication Critical patent/JPS4968801A/ja
Publication of JPS5418933B2 publication Critical patent/JPS5418933B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP11029672A 1972-11-06 1972-11-06 Expired JPS5418933B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11029672A JPS5418933B2 (de) 1972-11-06 1972-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11029672A JPS5418933B2 (de) 1972-11-06 1972-11-06

Publications (2)

Publication Number Publication Date
JPS4968801A JPS4968801A (de) 1974-07-03
JPS5418933B2 true JPS5418933B2 (de) 1979-07-11

Family

ID=14532085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11029672A Expired JPS5418933B2 (de) 1972-11-06 1972-11-06

Country Status (1)

Country Link
JP (1) JPS5418933B2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56101144A (en) * 1980-01-16 1981-08-13 Kimoto & Co Ltd Photosensitive material and its developing method
JPS5741636A (en) * 1980-08-27 1982-03-08 Toshiba Corp Photoresist composition
JPS57168248A (en) * 1981-04-09 1982-10-16 Kimoto & Co Ltd Formation of image with nonsilver photoresist composition
KR980010618A (ko) * 1996-07-16 1998-04-30 손욱 포토레지스트 조성물

Also Published As

Publication number Publication date
JPS4968801A (de) 1974-07-03

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