JPS5417291U - - Google Patents
Info
- Publication number
- JPS5417291U JPS5417291U JP8998977U JP8998977U JPS5417291U JP S5417291 U JPS5417291 U JP S5417291U JP 8998977 U JP8998977 U JP 8998977U JP 8998977 U JP8998977 U JP 8998977U JP S5417291 U JPS5417291 U JP S5417291U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8998977U JPS5739142Y2 (zh) | 1977-07-06 | 1977-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8998977U JPS5739142Y2 (zh) | 1977-07-06 | 1977-07-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5417291U true JPS5417291U (zh) | 1979-02-03 |
| JPS5739142Y2 JPS5739142Y2 (zh) | 1982-08-28 |
Family
ID=29017901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8998977U Expired JPS5739142Y2 (zh) | 1977-07-06 | 1977-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5739142Y2 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012042980A1 (ja) * | 2010-10-01 | 2012-04-05 | 三菱電機株式会社 | ワイヤ放電加工装置、ワイヤ放電加工方法、薄板製造方法および半導体ウェハ製造方法 |
| CN103228387A (zh) * | 2010-11-24 | 2013-07-31 | 三菱电机株式会社 | 金属丝放电加工装置以及半导体晶片制造方法 |
-
1977
- 1977-07-06 JP JP8998977U patent/JPS5739142Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012042980A1 (ja) * | 2010-10-01 | 2012-04-05 | 三菱電機株式会社 | ワイヤ放電加工装置、ワイヤ放電加工方法、薄板製造方法および半導体ウェハ製造方法 |
| CN103124611A (zh) * | 2010-10-01 | 2013-05-29 | 三菱电机株式会社 | 金属丝放电加工装置、金属丝放电加工方法、薄板制造方法以及半导体晶片制造方法 |
| JP5430771B2 (ja) * | 2010-10-01 | 2014-03-05 | 三菱電機株式会社 | ワイヤ放電加工装置、ワイヤ放電加工方法、薄板製造方法および半導体ウェハ製造方法 |
| CN103124611B (zh) * | 2010-10-01 | 2015-07-01 | 三菱电机株式会社 | 金属丝放电加工装置、金属丝放电加工方法、薄板制造方法以及半导体晶片制造方法 |
| CN103228387A (zh) * | 2010-11-24 | 2013-07-31 | 三菱电机株式会社 | 金属丝放电加工装置以及半导体晶片制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5739142Y2 (zh) | 1982-08-28 |