JPS54169987U - - Google Patents
Info
- Publication number
- JPS54169987U JPS54169987U JP6870478U JP6870478U JPS54169987U JP S54169987 U JPS54169987 U JP S54169987U JP 6870478 U JP6870478 U JP 6870478U JP 6870478 U JP6870478 U JP 6870478U JP S54169987 U JPS54169987 U JP S54169987U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Jigs For Machine Tools (AREA)
- Load-Engaging Elements For Cranes (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978068704U JPS5821636Y2 (ja) | 1978-05-22 | 1978-05-22 | 物体支持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978068704U JPS5821636Y2 (ja) | 1978-05-22 | 1978-05-22 | 物体支持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54169987U true JPS54169987U (cs) | 1979-11-30 |
| JPS5821636Y2 JPS5821636Y2 (ja) | 1983-05-09 |
Family
ID=28976826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978068704U Expired JPS5821636Y2 (ja) | 1978-05-22 | 1978-05-22 | 物体支持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821636Y2 (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004072108A (ja) * | 2002-08-02 | 2004-03-04 | Suss Microtec Lithography Gmbh | 薄く可撓性のある基板を固定する装置 |
| KR101133295B1 (ko) | 2009-09-15 | 2012-04-04 | 임권현 | 진공척용 진공밀착패드 |
-
1978
- 1978-05-22 JP JP1978068704U patent/JPS5821636Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004072108A (ja) * | 2002-08-02 | 2004-03-04 | Suss Microtec Lithography Gmbh | 薄く可撓性のある基板を固定する装置 |
| KR101133295B1 (ko) | 2009-09-15 | 2012-04-04 | 임권현 | 진공척용 진공밀착패드 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5821636Y2 (ja) | 1983-05-09 |