JPS54169987U - - Google Patents

Info

Publication number
JPS54169987U
JPS54169987U JP6870478U JP6870478U JPS54169987U JP S54169987 U JPS54169987 U JP S54169987U JP 6870478 U JP6870478 U JP 6870478U JP 6870478 U JP6870478 U JP 6870478U JP S54169987 U JPS54169987 U JP S54169987U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6870478U
Other languages
Japanese (ja)
Other versions
JPS5821636Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978068704U priority Critical patent/JPS5821636Y2/ja
Publication of JPS54169987U publication Critical patent/JPS54169987U/ja
Application granted granted Critical
Publication of JPS5821636Y2 publication Critical patent/JPS5821636Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
  • Jigs For Machine Tools (AREA)
  • Load-Engaging Elements For Cranes (AREA)
JP1978068704U 1978-05-22 1978-05-22 物体支持装置 Expired JPS5821636Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978068704U JPS5821636Y2 (ja) 1978-05-22 1978-05-22 物体支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978068704U JPS5821636Y2 (ja) 1978-05-22 1978-05-22 物体支持装置

Publications (2)

Publication Number Publication Date
JPS54169987U true JPS54169987U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-11-30
JPS5821636Y2 JPS5821636Y2 (ja) 1983-05-09

Family

ID=28976826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978068704U Expired JPS5821636Y2 (ja) 1978-05-22 1978-05-22 物体支持装置

Country Status (1)

Country Link
JP (1) JPS5821636Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004072108A (ja) * 2002-08-02 2004-03-04 Suss Microtec Lithography Gmbh 薄く可撓性のある基板を固定する装置
KR101133295B1 (ko) 2009-09-15 2012-04-04 임권현 진공척용 진공밀착패드

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004072108A (ja) * 2002-08-02 2004-03-04 Suss Microtec Lithography Gmbh 薄く可撓性のある基板を固定する装置
KR101133295B1 (ko) 2009-09-15 2012-04-04 임권현 진공척용 진공밀착패드

Also Published As

Publication number Publication date
JPS5821636Y2 (ja) 1983-05-09

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