JPS5416975A - Device for judging semiconductor wafer in conductive type - Google Patents
Device for judging semiconductor wafer in conductive typeInfo
- Publication number
- JPS5416975A JPS5416975A JP8103677A JP8103677A JPS5416975A JP S5416975 A JPS5416975 A JP S5416975A JP 8103677 A JP8103677 A JP 8103677A JP 8103677 A JP8103677 A JP 8103677A JP S5416975 A JPS5416975 A JP S5416975A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- conductive type
- judging
- judging semiconductor
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/27—Testing of devices without physical removal from the circuit of which they form part, e.g. compensating for effects surrounding elements
- G01R31/275—Testing of devices without physical removal from the circuit of which they form part, e.g. compensating for effects surrounding elements for testing individual semiconductor components within integrated circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8103677A JPS5416975A (en) | 1977-07-08 | 1977-07-08 | Device for judging semiconductor wafer in conductive type |
US05/922,284 US4213086A (en) | 1977-07-08 | 1978-07-06 | Selector device for the determination of the type of electroconductivity in semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8103677A JPS5416975A (en) | 1977-07-08 | 1977-07-08 | Device for judging semiconductor wafer in conductive type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5416975A true JPS5416975A (en) | 1979-02-07 |
Family
ID=13735216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8103677A Pending JPS5416975A (en) | 1977-07-08 | 1977-07-08 | Device for judging semiconductor wafer in conductive type |
Country Status (2)
Country | Link |
---|---|
US (1) | US4213086A (ja) |
JP (1) | JPS5416975A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4703252A (en) * | 1985-02-22 | 1987-10-27 | Prometrix Corporation | Apparatus and methods for resistivity testing |
US4816755A (en) * | 1988-03-02 | 1989-03-28 | Wright State University | Method and apparatus for measuring photoresistivity and photo hall-effect of semiconductor wafers |
US4857839A (en) * | 1988-03-02 | 1989-08-15 | Wright State University | Method and apparatus for measuring average resistivity and hall-effect of semiconductor wafers |
JP5151032B2 (ja) * | 2006-01-13 | 2013-02-27 | 株式会社日立製作所 | 磁界プローブ装置及び磁界プローブ素子 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU423068A1 (ja) * | 1972-04-14 | 1974-04-05 | В. Г. Пахомов, Б. Д. Попович, А. Л. Рубин , М. Э. Хургин Новосибирский авиационный завод В. П. Чкалова |
-
1977
- 1977-07-08 JP JP8103677A patent/JPS5416975A/ja active Pending
-
1978
- 1978-07-06 US US05/922,284 patent/US4213086A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4213086A (en) | 1980-07-15 |
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