JPS5416748B2 - - Google Patents

Info

Publication number
JPS5416748B2
JPS5416748B2 JP6198372A JP6198372A JPS5416748B2 JP S5416748 B2 JPS5416748 B2 JP S5416748B2 JP 6198372 A JP6198372 A JP 6198372A JP 6198372 A JP6198372 A JP 6198372A JP S5416748 B2 JPS5416748 B2 JP S5416748B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6198372A
Other versions
JPS4923646A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6198372A priority Critical patent/JPS5416748B2/ja
Publication of JPS4923646A publication Critical patent/JPS4923646A/ja
Publication of JPS5416748B2 publication Critical patent/JPS5416748B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP6198372A 1972-06-21 1972-06-21 Expired JPS5416748B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6198372A JPS5416748B2 (ja) 1972-06-21 1972-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6198372A JPS5416748B2 (ja) 1972-06-21 1972-06-21

Publications (2)

Publication Number Publication Date
JPS4923646A JPS4923646A (ja) 1974-03-02
JPS5416748B2 true JPS5416748B2 (ja) 1979-06-25

Family

ID=13186914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6198372A Expired JPS5416748B2 (ja) 1972-06-21 1972-06-21

Country Status (1)

Country Link
JP (1) JPS5416748B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210018145A (ko) 2019-08-09 2021-02-17 도쿄엘렉트론가부시키가이샤 배치대 및 기판 처리 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855746A (ja) * 1971-11-10 1973-08-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855746A (ja) * 1971-11-10 1973-08-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210018145A (ko) 2019-08-09 2021-02-17 도쿄엘렉트론가부시키가이샤 배치대 및 기판 처리 장치

Also Published As

Publication number Publication date
JPS4923646A (ja) 1974-03-02

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