JPS4923646A - - Google Patents

Info

Publication number
JPS4923646A
JPS4923646A JP6198372A JP6198372A JPS4923646A JP S4923646 A JPS4923646 A JP S4923646A JP 6198372 A JP6198372 A JP 6198372A JP 6198372 A JP6198372 A JP 6198372A JP S4923646 A JPS4923646 A JP S4923646A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6198372A
Other versions
JPS5416748B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6198372A priority Critical patent/JPS5416748B2/ja
Publication of JPS4923646A publication Critical patent/JPS4923646A/ja
Publication of JPS5416748B2 publication Critical patent/JPS5416748B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP6198372A 1972-06-21 1972-06-21 Expired JPS5416748B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6198372A JPS5416748B2 (ja) 1972-06-21 1972-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6198372A JPS5416748B2 (ja) 1972-06-21 1972-06-21

Publications (2)

Publication Number Publication Date
JPS4923646A true JPS4923646A (ja) 1974-03-02
JPS5416748B2 JPS5416748B2 (ja) 1979-06-25

Family

ID=13186914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6198372A Expired JPS5416748B2 (ja) 1972-06-21 1972-06-21

Country Status (1)

Country Link
JP (1) JPS5416748B2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7394556B2 (ja) 2019-08-09 2023-12-08 東京エレクトロン株式会社 載置台及び基板処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855746A (ja) * 1971-11-10 1973-08-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855746A (ja) * 1971-11-10 1973-08-04

Also Published As

Publication number Publication date
JPS5416748B2 (ja) 1979-06-25

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