JPS54165344U - - Google Patents
Info
- Publication number
- JPS54165344U JPS54165344U JP6414878U JP6414878U JPS54165344U JP S54165344 U JPS54165344 U JP S54165344U JP 6414878 U JP6414878 U JP 6414878U JP 6414878 U JP6414878 U JP 6414878U JP S54165344 U JPS54165344 U JP S54165344U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6414878U JPS54165344U (enExample) | 1978-05-13 | 1978-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6414878U JPS54165344U (enExample) | 1978-05-13 | 1978-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54165344U true JPS54165344U (enExample) | 1979-11-20 |
Family
ID=28968002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6414878U Pending JPS54165344U (enExample) | 1978-05-13 | 1978-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54165344U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016084990A (ja) * | 2014-10-27 | 2016-05-19 | 東京エレクトロン株式会社 | 熱処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53105739A (en) * | 1977-02-28 | 1978-09-14 | Clarion Co Ltd | Electric furnace of thermal radiation balancing type |
-
1978
- 1978-05-13 JP JP6414878U patent/JPS54165344U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53105739A (en) * | 1977-02-28 | 1978-09-14 | Clarion Co Ltd | Electric furnace of thermal radiation balancing type |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016084990A (ja) * | 2014-10-27 | 2016-05-19 | 東京エレクトロン株式会社 | 熱処理装置 |