JPS54165344U - - Google Patents

Info

Publication number
JPS54165344U
JPS54165344U JP6414878U JP6414878U JPS54165344U JP S54165344 U JPS54165344 U JP S54165344U JP 6414878 U JP6414878 U JP 6414878U JP 6414878 U JP6414878 U JP 6414878U JP S54165344 U JPS54165344 U JP S54165344U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6414878U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6414878U priority Critical patent/JPS54165344U/ja
Publication of JPS54165344U publication Critical patent/JPS54165344U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
JP6414878U 1978-05-13 1978-05-13 Pending JPS54165344U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6414878U JPS54165344U (enrdf_load_html_response) 1978-05-13 1978-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6414878U JPS54165344U (enrdf_load_html_response) 1978-05-13 1978-05-13

Publications (1)

Publication Number Publication Date
JPS54165344U true JPS54165344U (enrdf_load_html_response) 1979-11-20

Family

ID=28968002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6414878U Pending JPS54165344U (enrdf_load_html_response) 1978-05-13 1978-05-13

Country Status (1)

Country Link
JP (1) JPS54165344U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016084990A (ja) * 2014-10-27 2016-05-19 東京エレクトロン株式会社 熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105739A (en) * 1977-02-28 1978-09-14 Clarion Co Ltd Electric furnace of thermal radiation balancing type

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105739A (en) * 1977-02-28 1978-09-14 Clarion Co Ltd Electric furnace of thermal radiation balancing type

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016084990A (ja) * 2014-10-27 2016-05-19 東京エレクトロン株式会社 熱処理装置

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