JPS5416455B2 - - Google Patents
Info
- Publication number
- JPS5416455B2 JPS5416455B2 JP3999375A JP3999375A JPS5416455B2 JP S5416455 B2 JPS5416455 B2 JP S5416455B2 JP 3999375 A JP3999375 A JP 3999375A JP 3999375 A JP3999375 A JP 3999375A JP S5416455 B2 JPS5416455 B2 JP S5416455B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3999375A JPS51114340A (en) | 1975-04-01 | 1975-04-01 | Etching process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3999375A JPS51114340A (en) | 1975-04-01 | 1975-04-01 | Etching process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51114340A JPS51114340A (en) | 1976-10-08 |
| JPS5416455B2 true JPS5416455B2 (ja) | 1979-06-22 |
Family
ID=12568446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3999375A Granted JPS51114340A (en) | 1975-04-01 | 1975-04-01 | Etching process |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51114340A (ja) |
-
1975
- 1975-04-01 JP JP3999375A patent/JPS51114340A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51114340A (en) | 1976-10-08 |