JPS51114340A - Etching process - Google Patents

Etching process

Info

Publication number
JPS51114340A
JPS51114340A JP3999375A JP3999375A JPS51114340A JP S51114340 A JPS51114340 A JP S51114340A JP 3999375 A JP3999375 A JP 3999375A JP 3999375 A JP3999375 A JP 3999375A JP S51114340 A JPS51114340 A JP S51114340A
Authority
JP
Japan
Prior art keywords
etching process
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3999375A
Other languages
English (en)
Other versions
JPS5416455B2 (ja
Inventor
Gouji Kawakami
Suzuko Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3999375A priority Critical patent/JPS51114340A/ja
Publication of JPS51114340A publication Critical patent/JPS51114340A/ja
Publication of JPS5416455B2 publication Critical patent/JPS5416455B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
JP3999375A 1975-04-01 1975-04-01 Etching process Granted JPS51114340A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3999375A JPS51114340A (en) 1975-04-01 1975-04-01 Etching process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3999375A JPS51114340A (en) 1975-04-01 1975-04-01 Etching process

Publications (2)

Publication Number Publication Date
JPS51114340A true JPS51114340A (en) 1976-10-08
JPS5416455B2 JPS5416455B2 (ja) 1979-06-22

Family

ID=12568446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3999375A Granted JPS51114340A (en) 1975-04-01 1975-04-01 Etching process

Country Status (1)

Country Link
JP (1) JPS51114340A (ja)

Also Published As

Publication number Publication date
JPS5416455B2 (ja) 1979-06-22

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