JPS5416301B2 - - Google Patents

Info

Publication number
JPS5416301B2
JPS5416301B2 JP1945976A JP1945976A JPS5416301B2 JP S5416301 B2 JPS5416301 B2 JP S5416301B2 JP 1945976 A JP1945976 A JP 1945976A JP 1945976 A JP1945976 A JP 1945976A JP S5416301 B2 JPS5416301 B2 JP S5416301B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1945976A
Other versions
JPS52103174A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1945976A priority Critical patent/JPS52103174A/ja
Publication of JPS52103174A publication Critical patent/JPS52103174A/ja
Publication of JPS5416301B2 publication Critical patent/JPS5416301B2/ja
Granted legal-status Critical Current

Links

JP1945976A 1976-02-26 1976-02-26 Plateematerial transporting conveyor Granted JPS52103174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1945976A JPS52103174A (en) 1976-02-26 1976-02-26 Plateematerial transporting conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1945976A JPS52103174A (en) 1976-02-26 1976-02-26 Plateematerial transporting conveyor

Publications (2)

Publication Number Publication Date
JPS52103174A JPS52103174A (en) 1977-08-30
JPS5416301B2 true JPS5416301B2 (ja) 1979-06-21

Family

ID=11999890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1945976A Granted JPS52103174A (en) 1976-02-26 1976-02-26 Plateematerial transporting conveyor

Country Status (1)

Country Link
JP (1) JPS52103174A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236349Y2 (ja) * 1980-12-18 1987-09-16

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6274944B2 (ja) * 2014-03-28 2018-02-07 芝浦メカトロニクス株式会社 基板搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236349Y2 (ja) * 1980-12-18 1987-09-16

Also Published As

Publication number Publication date
JPS52103174A (en) 1977-08-30

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