JPS541629B2 - - Google Patents
Info
- Publication number
- JPS541629B2 JPS541629B2 JP9729073A JP9729073A JPS541629B2 JP S541629 B2 JPS541629 B2 JP S541629B2 JP 9729073 A JP9729073 A JP 9729073A JP 9729073 A JP9729073 A JP 9729073A JP S541629 B2 JPS541629 B2 JP S541629B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9729073A JPS541629B2 (enrdf_load_stackoverflow) | 1973-08-31 | 1973-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9729073A JPS541629B2 (enrdf_load_stackoverflow) | 1973-08-31 | 1973-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5046486A JPS5046486A (enrdf_load_stackoverflow) | 1975-04-25 |
| JPS541629B2 true JPS541629B2 (enrdf_load_stackoverflow) | 1979-01-26 |
Family
ID=14188357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9729073A Expired JPS541629B2 (enrdf_load_stackoverflow) | 1973-08-31 | 1973-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS541629B2 (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020004177A1 (ja) | 2018-06-25 | 2020-01-02 | 川崎重工業株式会社 | 導光装置及びレーザ加工装置 |
| WO2020004178A1 (ja) | 2018-06-25 | 2020-01-02 | 川崎重工業株式会社 | 導光装置及びレーザ加工装置 |
| WO2020162557A1 (ja) | 2019-02-07 | 2020-08-13 | 川崎重工業株式会社 | ポリゴンミラー、導光装置及び光走査装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5412568A (en) * | 1977-06-29 | 1979-01-30 | Sanyo Electric Co Ltd | Aligning method of semiconductor wafers |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS513744U (enrdf_load_stackoverflow) * | 1974-06-26 | 1976-01-12 |
-
1973
- 1973-08-31 JP JP9729073A patent/JPS541629B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020004177A1 (ja) | 2018-06-25 | 2020-01-02 | 川崎重工業株式会社 | 導光装置及びレーザ加工装置 |
| WO2020004178A1 (ja) | 2018-06-25 | 2020-01-02 | 川崎重工業株式会社 | 導光装置及びレーザ加工装置 |
| KR20210008094A (ko) | 2018-06-25 | 2021-01-20 | 카와사키 주코교 카부시키가이샤 | 도광 장치 및 레이저 가공 장치 |
| KR20210008093A (ko) | 2018-06-25 | 2021-01-20 | 카와사키 주코교 카부시키가이샤 | 도광 장치 및 레이저 가공 장치 |
| WO2020162557A1 (ja) | 2019-02-07 | 2020-08-13 | 川崎重工業株式会社 | ポリゴンミラー、導光装置及び光走査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5046486A (enrdf_load_stackoverflow) | 1975-04-25 |