JPS54160193A - Ct scanner - Google Patents

Ct scanner

Info

Publication number
JPS54160193A
JPS54160193A JP6896678A JP6896678A JPS54160193A JP S54160193 A JPS54160193 A JP S54160193A JP 6896678 A JP6896678 A JP 6896678A JP 6896678 A JP6896678 A JP 6896678A JP S54160193 A JPS54160193 A JP S54160193A
Authority
JP
Japan
Prior art keywords
collimator
center part
fringe
center
slit width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6896678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233897B2 (https=
Inventor
Kiyoto Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6896678A priority Critical patent/JPS54160193A/ja
Publication of JPS54160193A publication Critical patent/JPS54160193A/ja
Publication of JPS6233897B2 publication Critical patent/JPS6233897B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatus For Radiation Diagnosis (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP6896678A 1978-06-09 1978-06-09 Ct scanner Granted JPS54160193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6896678A JPS54160193A (en) 1978-06-09 1978-06-09 Ct scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6896678A JPS54160193A (en) 1978-06-09 1978-06-09 Ct scanner

Publications (2)

Publication Number Publication Date
JPS54160193A true JPS54160193A (en) 1979-12-18
JPS6233897B2 JPS6233897B2 (https=) 1987-07-23

Family

ID=13388915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6896678A Granted JPS54160193A (en) 1978-06-09 1978-06-09 Ct scanner

Country Status (1)

Country Link
JP (1) JPS54160193A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351303A (ja) * 2005-06-15 2006-12-28 Hitachi High-Technologies Corp パターン欠陥検査方法および装置
JP2011159636A (ja) * 2011-05-11 2011-08-18 Hitachi High-Technologies Corp パターン欠陥検査方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351303A (ja) * 2005-06-15 2006-12-28 Hitachi High-Technologies Corp パターン欠陥検査方法および装置
JP2011159636A (ja) * 2011-05-11 2011-08-18 Hitachi High-Technologies Corp パターン欠陥検査方法および装置

Also Published As

Publication number Publication date
JPS6233897B2 (https=) 1987-07-23

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