JPS54158547U - - Google Patents
Info
- Publication number
- JPS54158547U JPS54158547U JP5681978U JP5681978U JPS54158547U JP S54158547 U JPS54158547 U JP S54158547U JP 5681978 U JP5681978 U JP 5681978U JP 5681978 U JP5681978 U JP 5681978U JP S54158547 U JPS54158547 U JP S54158547U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978056819U JPS6214754Y2 (es) | 1978-04-25 | 1978-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978056819U JPS6214754Y2 (es) | 1978-04-25 | 1978-04-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54158547U true JPS54158547U (es) | 1979-11-05 |
| JPS6214754Y2 JPS6214754Y2 (es) | 1987-04-15 |
Family
ID=28954092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978056819U Expired JPS6214754Y2 (es) | 1978-04-25 | 1978-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214754Y2 (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111524781A (zh) * | 2019-02-05 | 2020-08-11 | 东京毅力科创株式会社 | 高频电源及等离子体处理装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4968378U (es) * | 1972-09-29 | 1974-06-14 | ||
| JPS5027758U (es) * | 1973-07-05 | 1975-03-31 | ||
| JPS5123331U (es) * | 1974-08-08 | 1976-02-20 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027758B2 (es) * | 1971-10-20 | 1975-09-10 |
-
1978
- 1978-04-25 JP JP1978056819U patent/JPS6214754Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4968378U (es) * | 1972-09-29 | 1974-06-14 | ||
| JPS5027758U (es) * | 1973-07-05 | 1975-03-31 | ||
| JPS5123331U (es) * | 1974-08-08 | 1976-02-20 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111524781A (zh) * | 2019-02-05 | 2020-08-11 | 东京毅力科创株式会社 | 高频电源及等离子体处理装置 |
| JP2020126776A (ja) * | 2019-02-05 | 2020-08-20 | 東京エレクトロン株式会社 | 高周波電源及びプラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6214754Y2 (es) | 1987-04-15 |