JPS54158177A - Method of fabricating complementary mos transistor - Google Patents

Method of fabricating complementary mos transistor

Info

Publication number
JPS54158177A
JPS54158177A JP6689678A JP6689678A JPS54158177A JP S54158177 A JPS54158177 A JP S54158177A JP 6689678 A JP6689678 A JP 6689678A JP 6689678 A JP6689678 A JP 6689678A JP S54158177 A JPS54158177 A JP S54158177A
Authority
JP
Japan
Prior art keywords
mos transistor
complementary mos
fabricating complementary
fabricating
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6689678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS624866B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP6689678A priority Critical patent/JPS54158177A/ja
Publication of JPS54158177A publication Critical patent/JPS54158177A/ja
Publication of JPS624866B2 publication Critical patent/JPS624866B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP6689678A 1978-06-02 1978-06-02 Method of fabricating complementary mos transistor Granted JPS54158177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6689678A JPS54158177A (en) 1978-06-02 1978-06-02 Method of fabricating complementary mos transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6689678A JPS54158177A (en) 1978-06-02 1978-06-02 Method of fabricating complementary mos transistor

Publications (2)

Publication Number Publication Date
JPS54158177A true JPS54158177A (en) 1979-12-13
JPS624866B2 JPS624866B2 (enrdf_load_stackoverflow) 1987-02-02

Family

ID=13329135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6689678A Granted JPS54158177A (en) 1978-06-02 1978-06-02 Method of fabricating complementary mos transistor

Country Status (1)

Country Link
JP (1) JPS54158177A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63137467A (ja) * 1986-11-29 1988-06-09 Sony Corp 半導体集積回路装置
JPH01200619A (ja) * 1988-02-05 1989-08-11 Yamaha Corp 集積回路装置の製法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63137467A (ja) * 1986-11-29 1988-06-09 Sony Corp 半導体集積回路装置
JPH01200619A (ja) * 1988-02-05 1989-08-11 Yamaha Corp 集積回路装置の製法

Also Published As

Publication number Publication date
JPS624866B2 (enrdf_load_stackoverflow) 1987-02-02

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