JPS54158165A - Liquid phase epitaxial jig for third to fifth group compound semiconductor - Google Patents

Liquid phase epitaxial jig for third to fifth group compound semiconductor

Info

Publication number
JPS54158165A
JPS54158165A JP6657478A JP6657478A JPS54158165A JP S54158165 A JPS54158165 A JP S54158165A JP 6657478 A JP6657478 A JP 6657478A JP 6657478 A JP6657478 A JP 6657478A JP S54158165 A JPS54158165 A JP S54158165A
Authority
JP
Japan
Prior art keywords
jig
liquid phase
compound semiconductor
group compound
phase epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6657478A
Other languages
Japanese (ja)
Inventor
Hideyasu Matsuo
Akio Karita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP6657478A priority Critical patent/JPS54158165A/en
Publication of JPS54158165A publication Critical patent/JPS54158165A/en
Pending legal-status Critical Current

Links

JP6657478A 1978-06-02 1978-06-02 Liquid phase epitaxial jig for third to fifth group compound semiconductor Pending JPS54158165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6657478A JPS54158165A (en) 1978-06-02 1978-06-02 Liquid phase epitaxial jig for third to fifth group compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6657478A JPS54158165A (en) 1978-06-02 1978-06-02 Liquid phase epitaxial jig for third to fifth group compound semiconductor

Publications (1)

Publication Number Publication Date
JPS54158165A true JPS54158165A (en) 1979-12-13

Family

ID=13319853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6657478A Pending JPS54158165A (en) 1978-06-02 1978-06-02 Liquid phase epitaxial jig for third to fifth group compound semiconductor

Country Status (1)

Country Link
JP (1) JPS54158165A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62270489A (en) * 1986-05-16 1987-11-24 Denki Kagaku Kogyo Kk Boat member for liquid phase epitaxy apparatus
JPH01176290A (en) * 1987-12-28 1989-07-12 Ibiden Co Ltd Graphite jig for liquid epitaxial growth

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62270489A (en) * 1986-05-16 1987-11-24 Denki Kagaku Kogyo Kk Boat member for liquid phase epitaxy apparatus
JPH01176290A (en) * 1987-12-28 1989-07-12 Ibiden Co Ltd Graphite jig for liquid epitaxial growth

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