JPS54158165A - Liquid phase epitaxial jig for third to fifth group compound semiconductor - Google Patents
Liquid phase epitaxial jig for third to fifth group compound semiconductorInfo
- Publication number
- JPS54158165A JPS54158165A JP6657478A JP6657478A JPS54158165A JP S54158165 A JPS54158165 A JP S54158165A JP 6657478 A JP6657478 A JP 6657478A JP 6657478 A JP6657478 A JP 6657478A JP S54158165 A JPS54158165 A JP S54158165A
- Authority
- JP
- Japan
- Prior art keywords
- jig
- liquid phase
- compound semiconductor
- group compound
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6657478A JPS54158165A (en) | 1978-06-02 | 1978-06-02 | Liquid phase epitaxial jig for third to fifth group compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6657478A JPS54158165A (en) | 1978-06-02 | 1978-06-02 | Liquid phase epitaxial jig for third to fifth group compound semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54158165A true JPS54158165A (en) | 1979-12-13 |
Family
ID=13319853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6657478A Pending JPS54158165A (en) | 1978-06-02 | 1978-06-02 | Liquid phase epitaxial jig for third to fifth group compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54158165A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62270489A (en) * | 1986-05-16 | 1987-11-24 | Denki Kagaku Kogyo Kk | Boat member for liquid phase epitaxy apparatus |
JPH01176290A (en) * | 1987-12-28 | 1989-07-12 | Ibiden Co Ltd | Graphite jig for liquid epitaxial growth |
-
1978
- 1978-06-02 JP JP6657478A patent/JPS54158165A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62270489A (en) * | 1986-05-16 | 1987-11-24 | Denki Kagaku Kogyo Kk | Boat member for liquid phase epitaxy apparatus |
JPH01176290A (en) * | 1987-12-28 | 1989-07-12 | Ibiden Co Ltd | Graphite jig for liquid epitaxial growth |
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