JPS5415665B2 - - Google Patents

Info

Publication number
JPS5415665B2
JPS5415665B2 JP6812877A JP6812877A JPS5415665B2 JP S5415665 B2 JPS5415665 B2 JP S5415665B2 JP 6812877 A JP6812877 A JP 6812877A JP 6812877 A JP6812877 A JP 6812877A JP S5415665 B2 JPS5415665 B2 JP S5415665B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6812877A
Other languages
Japanese (ja)
Other versions
JPS543476A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6812877A priority Critical patent/JPS543476A/en
Publication of JPS543476A publication Critical patent/JPS543476A/en
Publication of JPS5415665B2 publication Critical patent/JPS5415665B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP6812877A 1977-06-09 1977-06-09 Electron beam exposure device Granted JPS543476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6812877A JPS543476A (en) 1977-06-09 1977-06-09 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6812877A JPS543476A (en) 1977-06-09 1977-06-09 Electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS543476A JPS543476A (en) 1979-01-11
JPS5415665B2 true JPS5415665B2 (en) 1979-06-16

Family

ID=13364790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6812877A Granted JPS543476A (en) 1977-06-09 1977-06-09 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS543476A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams
JPS53124078A (en) * 1977-02-23 1978-10-30 Ibm Electron beam device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams
JPS53124078A (en) * 1977-02-23 1978-10-30 Ibm Electron beam device

Also Published As

Publication number Publication date
JPS543476A (en) 1979-01-11

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