JPS5415665B2 - - Google Patents
Info
- Publication number
- JPS5415665B2 JPS5415665B2 JP6812877A JP6812877A JPS5415665B2 JP S5415665 B2 JPS5415665 B2 JP S5415665B2 JP 6812877 A JP6812877 A JP 6812877A JP 6812877 A JP6812877 A JP 6812877A JP S5415665 B2 JPS5415665 B2 JP S5415665B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6812877A JPS543476A (en) | 1977-06-09 | 1977-06-09 | Electron beam exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6812877A JPS543476A (en) | 1977-06-09 | 1977-06-09 | Electron beam exposure device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS543476A JPS543476A (en) | 1979-01-11 |
JPS5415665B2 true JPS5415665B2 (en) | 1979-06-16 |
Family
ID=13364790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6812877A Granted JPS543476A (en) | 1977-06-09 | 1977-06-09 | Electron beam exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS543476A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
JPS53124078A (en) * | 1977-02-23 | 1978-10-30 | Ibm | Electron beam device |
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1977
- 1977-06-09 JP JP6812877A patent/JPS543476A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
JPS53124078A (en) * | 1977-02-23 | 1978-10-30 | Ibm | Electron beam device |
Also Published As
Publication number | Publication date |
---|---|
JPS543476A (en) | 1979-01-11 |