JPS54152456A - Device for centering charged particle beam - Google Patents
Device for centering charged particle beamInfo
- Publication number
- JPS54152456A JPS54152456A JP6079478A JP6079478A JPS54152456A JP S54152456 A JPS54152456 A JP S54152456A JP 6079478 A JP6079478 A JP 6079478A JP 6079478 A JP6079478 A JP 6079478A JP S54152456 A JPS54152456 A JP S54152456A
- Authority
- JP
- Japan
- Prior art keywords
- centering
- charged particle
- particle beam
- charged
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6079478A JPS54152456A (en) | 1978-05-22 | 1978-05-22 | Device for centering charged particle beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6079478A JPS54152456A (en) | 1978-05-22 | 1978-05-22 | Device for centering charged particle beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54152456A true JPS54152456A (en) | 1979-11-30 |
Family
ID=13152560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6079478A Pending JPS54152456A (en) | 1978-05-22 | 1978-05-22 | Device for centering charged particle beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54152456A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5767912A (en) * | 1980-10-14 | 1982-04-24 | Toshiba Corp | Axis aligning method of electronic optical lens barrel |
-
1978
- 1978-05-22 JP JP6079478A patent/JPS54152456A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5767912A (en) * | 1980-10-14 | 1982-04-24 | Toshiba Corp | Axis aligning method of electronic optical lens barrel |
JPH0234139B2 (ja) * | 1980-10-14 | 1990-08-01 | Tokyo Shibaura Electric Co |
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