JPS54152869A - Device for automatically centering charged particle beam - Google Patents

Device for automatically centering charged particle beam

Info

Publication number
JPS54152869A
JPS54152869A JP6128178A JP6128178A JPS54152869A JP S54152869 A JPS54152869 A JP S54152869A JP 6128178 A JP6128178 A JP 6128178A JP 6128178 A JP6128178 A JP 6128178A JP S54152869 A JPS54152869 A JP S54152869A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
automatically centering
centering
automatically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6128178A
Other languages
Japanese (ja)
Inventor
Akio Ishikawa
Shigetomo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP6128178A priority Critical patent/JPS54152869A/en
Publication of JPS54152869A publication Critical patent/JPS54152869A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP6128178A 1978-05-23 1978-05-23 Device for automatically centering charged particle beam Pending JPS54152869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6128178A JPS54152869A (en) 1978-05-23 1978-05-23 Device for automatically centering charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6128178A JPS54152869A (en) 1978-05-23 1978-05-23 Device for automatically centering charged particle beam

Publications (1)

Publication Number Publication Date
JPS54152869A true JPS54152869A (en) 1979-12-01

Family

ID=13166656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6128178A Pending JPS54152869A (en) 1978-05-23 1978-05-23 Device for automatically centering charged particle beam

Country Status (1)

Country Link
JP (1) JPS54152869A (en)

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