JPS54151265U - - Google Patents
Info
- Publication number
- JPS54151265U JPS54151265U JP4707478U JP4707478U JPS54151265U JP S54151265 U JPS54151265 U JP S54151265U JP 4707478 U JP4707478 U JP 4707478U JP 4707478 U JP4707478 U JP 4707478U JP S54151265 U JPS54151265 U JP S54151265U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4707478U JPS54151265U (enExample) | 1978-04-12 | 1978-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4707478U JPS54151265U (enExample) | 1978-04-12 | 1978-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54151265U true JPS54151265U (enExample) | 1979-10-20 |
Family
ID=28928327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4707478U Pending JPS54151265U (enExample) | 1978-04-12 | 1978-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54151265U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002022415A (ja) * | 2000-05-01 | 2002-01-23 | Hitachi Electronics Eng Co Ltd | 微小突起物検査装置 |
| WO2007097350A1 (ja) * | 2006-02-21 | 2007-08-30 | Nikon Corporation | 位置計測装置及び位置計測方法、移動体駆動システム及び移動体駆動方法、パターン形成装置及びパターン形成方法、露光装置及び露光方法、並びにデバイス製造方法 |
| JP2009264778A (ja) * | 2008-04-22 | 2009-11-12 | Satoshi Kiyono | 光スポット変位検出装置及び計測装置 |
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1978
- 1978-04-12 JP JP4707478U patent/JPS54151265U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002022415A (ja) * | 2000-05-01 | 2002-01-23 | Hitachi Electronics Eng Co Ltd | 微小突起物検査装置 |
| WO2007097350A1 (ja) * | 2006-02-21 | 2007-08-30 | Nikon Corporation | 位置計測装置及び位置計測方法、移動体駆動システム及び移動体駆動方法、パターン形成装置及びパターン形成方法、露光装置及び露光方法、並びにデバイス製造方法 |
| JP2009264778A (ja) * | 2008-04-22 | 2009-11-12 | Satoshi Kiyono | 光スポット変位検出装置及び計測装置 |