JPS54150968A - Heat treatment device - Google Patents
Heat treatment deviceInfo
- Publication number
- JPS54150968A JPS54150968A JP5960578A JP5960578A JPS54150968A JP S54150968 A JPS54150968 A JP S54150968A JP 5960578 A JP5960578 A JP 5960578A JP 5960578 A JP5960578 A JP 5960578A JP S54150968 A JPS54150968 A JP S54150968A
- Authority
- JP
- Japan
- Prior art keywords
- cap
- heat treatment
- gas
- supply inlet
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To prevent the reverse current of the gas and thus to secure a uniform thickness for the semiconductor wafer by fitting the end cap with the barrier plate containing plural notches inside to the opening part of the heat treatment tube having the gas supply inlet at one end and an opening at the other end.
CONSTITUTION: Gas supply inlet 2 is provided at one end part of heat treatment tube 1 surrounded by heating device 6, and opening part 3 is secured at the other end. Then end cap 4 having gas supply inlet 5 is fitted into part 3, and at the same time barrier plates 7aW7c of disk form holding notch parts 8aW8c at the outer circumference and featuring almost same diameter as cap 4 are attached within cap 4. In this case parts 8aW8c are provided alternately up and down, and also gas passing gap parts 9aW9c caused by attachment of barrier plates is set less than 1/3 the inner diameter of cap 4. As a result, the reverse current of gas going toward the uniform-heating part of tube 1 can be eliminated by exhausted in the form of the disturbed current, thus ensuring the uniform heat treatment for the stored semiconductor wafer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5960578A JPS5849015B2 (en) | 1978-05-18 | 1978-05-18 | heat treatment equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5960578A JPS5849015B2 (en) | 1978-05-18 | 1978-05-18 | heat treatment equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54150968A true JPS54150968A (en) | 1979-11-27 |
JPS5849015B2 JPS5849015B2 (en) | 1983-11-01 |
Family
ID=13118044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5960578A Expired JPS5849015B2 (en) | 1978-05-18 | 1978-05-18 | heat treatment equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5849015B2 (en) |
-
1978
- 1978-05-18 JP JP5960578A patent/JPS5849015B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5849015B2 (en) | 1983-11-01 |
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