JPS54149420A - Image pickup system - Google Patents
Image pickup systemInfo
- Publication number
- JPS54149420A JPS54149420A JP5797478A JP5797478A JPS54149420A JP S54149420 A JPS54149420 A JP S54149420A JP 5797478 A JP5797478 A JP 5797478A JP 5797478 A JP5797478 A JP 5797478A JP S54149420 A JPS54149420 A JP S54149420A
- Authority
- JP
- Japan
- Prior art keywords
- speed
- pulse motor
- shutter
- image pickup
- pickup unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Shutters For Cameras (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Control Of Stepping Motors (AREA)
Abstract
PURPOSE:To obtain an image pickup unit by which a shutter operation having enough durability to be used practically and a high-speed and equal-speed property is made possible and an accurate exposure can be completed in the vertical blanking time of the image pickup unit. CONSTITUTION:The shutter of a two-dimensional pickup unit is constituted by the light flux switching material having optical aperture part 31 and light shielding part 32, pulse motor 1 to rotate this material to cause the shutter operation, and shutter control and driving circuits 115 and 116. These control and driving circuits 115 and 116 output driving pulses of a frequency, which is so set that pulse motor 1 can rotate at a high speed and an equal angle speed in a prescribed step just after the driving determined by the inertial load of the light flux switching material, etc., to pulse motor 1 and drive it, and the shutter operation is performed during the high- speed and equal angle-speed rotation period of the driven pulse motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53057974A JPS607870B2 (en) | 1978-05-16 | 1978-05-16 | Imaging method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53057974A JPS607870B2 (en) | 1978-05-16 | 1978-05-16 | Imaging method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54149420A true JPS54149420A (en) | 1979-11-22 |
| JPS607870B2 JPS607870B2 (en) | 1985-02-27 |
Family
ID=13070973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53057974A Expired JPS607870B2 (en) | 1978-05-16 | 1978-05-16 | Imaging method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS607870B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180124968A (en) * | 2016-03-31 | 2018-11-21 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | A shutter device used for exposure in a lithography machine and a method for its use |
-
1978
- 1978-05-16 JP JP53057974A patent/JPS607870B2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180124968A (en) * | 2016-03-31 | 2018-11-21 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | A shutter device used for exposure in a lithography machine and a method for its use |
| JP2019516125A (en) * | 2016-03-31 | 2019-06-13 | シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド | Shutter device for use in lithography machine exposure and method of using the same |
| US10712668B2 (en) | 2016-03-31 | 2020-07-14 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Shutter device used for exposure in lithography machine, and method for use thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS607870B2 (en) | 1985-02-27 |
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