JPS54148604A - Method of endless exposure - Google Patents

Method of endless exposure

Info

Publication number
JPS54148604A
JPS54148604A JP5597678A JP5597678A JPS54148604A JP S54148604 A JPS54148604 A JP S54148604A JP 5597678 A JP5597678 A JP 5597678A JP 5597678 A JP5597678 A JP 5597678A JP S54148604 A JPS54148604 A JP S54148604A
Authority
JP
Japan
Prior art keywords
endless
exposure
endless exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5597678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS633304B2 (enrdf_load_stackoverflow
Inventor
Takeshi Inoue
Susumu Tanida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP5597678A priority Critical patent/JPS54148604A/ja
Publication of JPS54148604A publication Critical patent/JPS54148604A/ja
Publication of JPS633304B2 publication Critical patent/JPS633304B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP5597678A 1978-05-11 1978-05-11 Method of endless exposure Granted JPS54148604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5597678A JPS54148604A (en) 1978-05-11 1978-05-11 Method of endless exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5597678A JPS54148604A (en) 1978-05-11 1978-05-11 Method of endless exposure

Publications (2)

Publication Number Publication Date
JPS54148604A true JPS54148604A (en) 1979-11-21
JPS633304B2 JPS633304B2 (enrdf_load_stackoverflow) 1988-01-22

Family

ID=13014096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5597678A Granted JPS54148604A (en) 1978-05-11 1978-05-11 Method of endless exposure

Country Status (1)

Country Link
JP (1) JPS54148604A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS633304B2 (enrdf_load_stackoverflow) 1988-01-22

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