JPS54145911A - Pulse motor - Google Patents

Pulse motor

Info

Publication number
JPS54145911A
JPS54145911A JP5389278A JP5389278A JPS54145911A JP S54145911 A JPS54145911 A JP S54145911A JP 5389278 A JP5389278 A JP 5389278A JP 5389278 A JP5389278 A JP 5389278A JP S54145911 A JPS54145911 A JP S54145911A
Authority
JP
Japan
Prior art keywords
pulse motor
pulse
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5389278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6412173B2 (enrdf_load_stackoverflow
Inventor
Toshio Sankouchi
Yasuyuki Kojima
Genichi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Priority to JP5389278A priority Critical patent/JPS54145911A/ja
Publication of JPS54145911A publication Critical patent/JPS54145911A/ja
Publication of JPS6412173B2 publication Critical patent/JPS6412173B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L9/00—Rigid pipes
    • F16L9/02—Rigid pipes of metal

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
JP5389278A 1978-05-06 1978-05-06 Pulse motor Granted JPS54145911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5389278A JPS54145911A (en) 1978-05-06 1978-05-06 Pulse motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5389278A JPS54145911A (en) 1978-05-06 1978-05-06 Pulse motor

Publications (2)

Publication Number Publication Date
JPS54145911A true JPS54145911A (en) 1979-11-14
JPS6412173B2 JPS6412173B2 (enrdf_load_stackoverflow) 1989-02-28

Family

ID=12955365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5389278A Granted JPS54145911A (en) 1978-05-06 1978-05-06 Pulse motor

Country Status (1)

Country Link
JP (1) JPS54145911A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000046911A1 (fr) * 1999-02-04 2000-08-10 Nikon Corporation Dispositif a moteur plat et procede d'entrainement correspondant, unite d'activation et procede d'entrainement correspondant, appareil d'exposition et procede correspondant et dispositif avec procede de fabrication correspondant
US6777896B2 (en) 2002-07-09 2004-08-17 Nikon Corporation Methods and apparatus for initializing a planar motor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000046911A1 (fr) * 1999-02-04 2000-08-10 Nikon Corporation Dispositif a moteur plat et procede d'entrainement correspondant, unite d'activation et procede d'entrainement correspondant, appareil d'exposition et procede correspondant et dispositif avec procede de fabrication correspondant
US6720680B1 (en) 1999-02-04 2004-04-13 Nikon Corporation Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method
KR100855921B1 (ko) * 1999-02-04 2008-09-02 가부시키가이샤 니콘 평면모터장치 및 그 구동방법, 스테이지장치 및 그구동방법, 노광장치 및 노광방법, 그리고 디바이스 및 그제조방법
US6777896B2 (en) 2002-07-09 2004-08-17 Nikon Corporation Methods and apparatus for initializing a planar motor

Also Published As

Publication number Publication date
JPS6412173B2 (enrdf_load_stackoverflow) 1989-02-28

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