JPS54145911A - Pulse motor - Google Patents
Pulse motorInfo
- Publication number
- JPS54145911A JPS54145911A JP5389278A JP5389278A JPS54145911A JP S54145911 A JPS54145911 A JP S54145911A JP 5389278 A JP5389278 A JP 5389278A JP 5389278 A JP5389278 A JP 5389278A JP S54145911 A JPS54145911 A JP S54145911A
- Authority
- JP
- Japan
- Prior art keywords
- pulse motor
- pulse
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L9/00—Rigid pipes
- F16L9/02—Rigid pipes of metal
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5389278A JPS54145911A (en) | 1978-05-06 | 1978-05-06 | Pulse motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5389278A JPS54145911A (en) | 1978-05-06 | 1978-05-06 | Pulse motor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54145911A true JPS54145911A (en) | 1979-11-14 |
JPS6412173B2 JPS6412173B2 (en) | 1989-02-28 |
Family
ID=12955365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5389278A Granted JPS54145911A (en) | 1978-05-06 | 1978-05-06 | Pulse motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54145911A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000046911A1 (en) * | 1999-02-04 | 2000-08-10 | Nikon Corporation | Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method |
US6777896B2 (en) | 2002-07-09 | 2004-08-17 | Nikon Corporation | Methods and apparatus for initializing a planar motor |
-
1978
- 1978-05-06 JP JP5389278A patent/JPS54145911A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000046911A1 (en) * | 1999-02-04 | 2000-08-10 | Nikon Corporation | Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method |
US6720680B1 (en) | 1999-02-04 | 2004-04-13 | Nikon Corporation | Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method |
KR100855921B1 (en) * | 1999-02-04 | 2008-09-02 | 가부시키가이샤 니콘 | Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method |
US6777896B2 (en) | 2002-07-09 | 2004-08-17 | Nikon Corporation | Methods and apparatus for initializing a planar motor |
Also Published As
Publication number | Publication date |
---|---|
JPS6412173B2 (en) | 1989-02-28 |
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