JPS54145197A - Gas sensitive element - Google Patents
Gas sensitive elementInfo
- Publication number
- JPS54145197A JPS54145197A JP5236878A JP5236878A JPS54145197A JP S54145197 A JPS54145197 A JP S54145197A JP 5236878 A JP5236878 A JP 5236878A JP 5236878 A JP5236878 A JP 5236878A JP S54145197 A JPS54145197 A JP S54145197A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas sensitive
- catalyst layer
- sensitive body
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 abstract 8
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 abstract 4
- 239000003054 catalyst Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000001282 iso-butane Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 2
- 229910001887 tin oxide Inorganic materials 0.000 abstract 2
- 230000032683 aging Effects 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5236878A JPS54145197A (en) | 1978-05-02 | 1978-05-02 | Gas sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5236878A JPS54145197A (en) | 1978-05-02 | 1978-05-02 | Gas sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54145197A true JPS54145197A (en) | 1979-11-13 |
| JPS6122776B2 JPS6122776B2 (enrdf_load_stackoverflow) | 1986-06-03 |
Family
ID=12912860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5236878A Granted JPS54145197A (en) | 1978-05-02 | 1978-05-02 | Gas sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54145197A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170759A (ja) * | 1984-02-16 | 1985-09-04 | Matsushita Electric Ind Co Ltd | 可燃性ガス検知素子 |
| KR100780076B1 (ko) * | 2001-11-08 | 2007-11-29 | 허증수 | 반도체형 가스센서용 감지막 형성방법 및 반도체형가스센서 어레이 |
-
1978
- 1978-05-02 JP JP5236878A patent/JPS54145197A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170759A (ja) * | 1984-02-16 | 1985-09-04 | Matsushita Electric Ind Co Ltd | 可燃性ガス検知素子 |
| KR100780076B1 (ko) * | 2001-11-08 | 2007-11-29 | 허증수 | 반도체형 가스센서용 감지막 형성방법 및 반도체형가스센서 어레이 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6122776B2 (enrdf_load_stackoverflow) | 1986-06-03 |
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