JPS5414470B2 - - Google Patents

Info

Publication number
JPS5414470B2
JPS5414470B2 JP7257575A JP7257575A JPS5414470B2 JP S5414470 B2 JPS5414470 B2 JP S5414470B2 JP 7257575 A JP7257575 A JP 7257575A JP 7257575 A JP7257575 A JP 7257575A JP S5414470 B2 JPS5414470 B2 JP S5414470B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7257575A
Other languages
Japanese (ja)
Other versions
JPS51148365A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7257575A priority Critical patent/JPS51148365A/ja
Publication of JPS51148365A publication Critical patent/JPS51148365A/ja
Publication of JPS5414470B2 publication Critical patent/JPS5414470B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP7257575A 1975-06-14 1975-06-14 Electron beam exposure method Granted JPS51148365A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257575A JPS51148365A (en) 1975-06-14 1975-06-14 Electron beam exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257575A JPS51148365A (en) 1975-06-14 1975-06-14 Electron beam exposure method

Publications (2)

Publication Number Publication Date
JPS51148365A JPS51148365A (en) 1976-12-20
JPS5414470B2 true JPS5414470B2 (enrdf_load_stackoverflow) 1979-06-07

Family

ID=13493306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257575A Granted JPS51148365A (en) 1975-06-14 1975-06-14 Electron beam exposure method

Country Status (1)

Country Link
JP (1) JPS51148365A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208132A (en) * 1981-06-17 1982-12-21 Toshiba Corp Electron-beam exposure apparatus
JPS5861628A (ja) * 1981-10-08 1983-04-12 Nippon Telegr & Teleph Corp <Ntt> 電子ビ−ム露光における近接効果補正方法
US4520269A (en) * 1982-11-03 1985-05-28 International Business Machines Corporation Electron beam lithography proximity correction method
JP3301400B2 (ja) * 1999-01-22 2002-07-15 日本電気株式会社 パターン描画用データ作成方法
JP4870148B2 (ja) * 2006-02-22 2012-02-08 パナソニック株式会社 梱包装置

Also Published As

Publication number Publication date
JPS51148365A (en) 1976-12-20

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