JPS54142979A - Automatic electron-beam axis adjuster - Google Patents

Automatic electron-beam axis adjuster

Info

Publication number
JPS54142979A
JPS54142979A JP4984278A JP4984278A JPS54142979A JP S54142979 A JPS54142979 A JP S54142979A JP 4984278 A JP4984278 A JP 4984278A JP 4984278 A JP4984278 A JP 4984278A JP S54142979 A JPS54142979 A JP S54142979A
Authority
JP
Japan
Prior art keywords
current
deflecting
output
oscillator
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4984278A
Other languages
English (en)
Other versions
JPS5840820B2 (ja
Inventor
Kazuyuki Koike
Shigeyuki Hosoki
Katsuhiro Kuroda
Shigeru Moriya
Akihira Fujinami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP4984278A priority Critical patent/JPS5840820B2/ja
Publication of JPS54142979A publication Critical patent/JPS54142979A/ja
Publication of JPS5840820B2 publication Critical patent/JPS5840820B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP4984278A 1978-04-28 1978-04-28 電子ビ−ム自動軸調整装置 Expired JPS5840820B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4984278A JPS5840820B2 (ja) 1978-04-28 1978-04-28 電子ビ−ム自動軸調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4984278A JPS5840820B2 (ja) 1978-04-28 1978-04-28 電子ビ−ム自動軸調整装置

Publications (2)

Publication Number Publication Date
JPS54142979A true JPS54142979A (en) 1979-11-07
JPS5840820B2 JPS5840820B2 (ja) 1983-09-08

Family

ID=12842318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4984278A Expired JPS5840820B2 (ja) 1978-04-28 1978-04-28 電子ビ−ム自動軸調整装置

Country Status (1)

Country Link
JP (1) JPS5840820B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010720A (ja) * 1983-06-27 1985-01-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 電子ビ−ム制御装置
JPS6074617A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd 電子ビ−ム装置のビ−ム調整方法
JPS60213000A (ja) * 1984-04-06 1985-10-25 株式会社日本製鋼所 ビ−ムの取出し方向修正方法
JP2007266016A (ja) * 2007-07-23 2007-10-11 Hitachi Ltd 電子顕微鏡

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214507A (ja) * 1985-03-20 1986-09-24 Osaka Denki Kk プラズマアーク切断用電源の直流リアクトル

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010720A (ja) * 1983-06-27 1985-01-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 電子ビ−ム制御装置
JPH0348649B2 (ja) * 1983-06-27 1991-07-25 Intaanashonaru Bijinesu Mashiinzu Corp
JPS6074617A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd 電子ビ−ム装置のビ−ム調整方法
JPS60213000A (ja) * 1984-04-06 1985-10-25 株式会社日本製鋼所 ビ−ムの取出し方向修正方法
JP2007266016A (ja) * 2007-07-23 2007-10-11 Hitachi Ltd 電子顕微鏡

Also Published As

Publication number Publication date
JPS5840820B2 (ja) 1983-09-08

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