JPS5413352B2 - - Google Patents
Info
- Publication number
- JPS5413352B2 JPS5413352B2 JP3242076A JP3242076A JPS5413352B2 JP S5413352 B2 JPS5413352 B2 JP S5413352B2 JP 3242076 A JP3242076 A JP 3242076A JP 3242076 A JP3242076 A JP 3242076A JP S5413352 B2 JPS5413352 B2 JP S5413352B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3242076A JPS52116078A (en) | 1976-03-26 | 1976-03-26 | Electron beam-exposing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3242076A JPS52116078A (en) | 1976-03-26 | 1976-03-26 | Electron beam-exposing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52116078A JPS52116078A (en) | 1977-09-29 |
| JPS5413352B2 true JPS5413352B2 (cs) | 1979-05-30 |
Family
ID=12358445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3242076A Granted JPS52116078A (en) | 1976-03-26 | 1976-03-26 | Electron beam-exposing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52116078A (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58107632A (ja) * | 1981-12-22 | 1983-06-27 | Tohoku Tokushuko Kk | 電子ビ−ム描画装置用材料 |
| JP2705785B2 (ja) * | 1994-03-14 | 1998-01-28 | キヤノン株式会社 | ステージ装置 |
| JP2899250B2 (ja) * | 1996-07-29 | 1999-06-02 | キヤノン株式会社 | 半導体製造装置 |
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1976
- 1976-03-26 JP JP3242076A patent/JPS52116078A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52116078A (en) | 1977-09-29 |