JPS54133322A - Positive type ionizing radiation sensitive resist - Google Patents

Positive type ionizing radiation sensitive resist

Info

Publication number
JPS54133322A
JPS54133322A JP4108778A JP4108778A JPS54133322A JP S54133322 A JPS54133322 A JP S54133322A JP 4108778 A JP4108778 A JP 4108778A JP 4108778 A JP4108778 A JP 4108778A JP S54133322 A JPS54133322 A JP S54133322A
Authority
JP
Japan
Prior art keywords
ionizing radiation
radiation sensitive
positive type
sensitive resist
type ionizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4108778A
Other languages
Japanese (ja)
Inventor
Akizou Hideyama
Akira Miura
Iwao Toukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP4108778A priority Critical patent/JPS54133322A/en
Publication of JPS54133322A publication Critical patent/JPS54133322A/en
Pending legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP4108778A 1978-04-07 1978-04-07 Positive type ionizing radiation sensitive resist Pending JPS54133322A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4108778A JPS54133322A (en) 1978-04-07 1978-04-07 Positive type ionizing radiation sensitive resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4108778A JPS54133322A (en) 1978-04-07 1978-04-07 Positive type ionizing radiation sensitive resist

Publications (1)

Publication Number Publication Date
JPS54133322A true JPS54133322A (en) 1979-10-17

Family

ID=12598680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4108778A Pending JPS54133322A (en) 1978-04-07 1978-04-07 Positive type ionizing radiation sensitive resist

Country Status (1)

Country Link
JP (1) JPS54133322A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664337A (en) * 1979-10-29 1981-06-01 Matsushita Electric Ind Co Ltd Radiation resist material and radiation resist pattern forming method
JPS602946A (en) * 1983-06-20 1985-01-09 Fujitsu Ltd Positive type resist material
JPH022564A (en) * 1988-06-15 1990-01-08 Toagosei Chem Ind Co Ltd Positive type electron beam resist
JPH0328851A (en) * 1988-05-24 1991-02-07 Toppan Printing Co Ltd Method for forming electron beam resist pattern
US5919603A (en) * 1992-08-28 1999-07-06 Hitachi, Ltd. Process for producing printed wiring board

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664337A (en) * 1979-10-29 1981-06-01 Matsushita Electric Ind Co Ltd Radiation resist material and radiation resist pattern forming method
JPS602946A (en) * 1983-06-20 1985-01-09 Fujitsu Ltd Positive type resist material
JPH0377986B2 (en) * 1983-06-20 1991-12-12 Fujitsu Ltd
JPH0328851A (en) * 1988-05-24 1991-02-07 Toppan Printing Co Ltd Method for forming electron beam resist pattern
JPH022564A (en) * 1988-06-15 1990-01-08 Toagosei Chem Ind Co Ltd Positive type electron beam resist
US5919603A (en) * 1992-08-28 1999-07-06 Hitachi, Ltd. Process for producing printed wiring board

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