JPS5412793Y2 - - Google Patents
Info
- Publication number
- JPS5412793Y2 JPS5412793Y2 JP7178573U JP7178573U JPS5412793Y2 JP S5412793 Y2 JPS5412793 Y2 JP S5412793Y2 JP 7178573 U JP7178573 U JP 7178573U JP 7178573 U JP7178573 U JP 7178573U JP S5412793 Y2 JPS5412793 Y2 JP S5412793Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7178573U JPS5412793Y2 (en) | 1973-06-19 | 1973-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7178573U JPS5412793Y2 (en) | 1973-06-19 | 1973-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5021197U JPS5021197U (en) | 1975-03-10 |
| JPS5412793Y2 true JPS5412793Y2 (en) | 1979-06-02 |
Family
ID=28241762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7178573U Expired JPS5412793Y2 (en) | 1973-06-19 | 1973-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5412793Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023127050A (en) * | 2022-03-01 | 2023-09-13 | 株式会社荏原製作所 | Polishing head and polishing device |
-
1973
- 1973-06-19 JP JP7178573U patent/JPS5412793Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5021197U (en) | 1975-03-10 |