JPS54127703A - Method of making photomask - Google Patents

Method of making photomask

Info

Publication number
JPS54127703A
JPS54127703A JP3415978A JP3415978A JPS54127703A JP S54127703 A JPS54127703 A JP S54127703A JP 3415978 A JP3415978 A JP 3415978A JP 3415978 A JP3415978 A JP 3415978A JP S54127703 A JPS54127703 A JP S54127703A
Authority
JP
Japan
Prior art keywords
making photomask
photomask
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3415978A
Other languages
Japanese (ja)
Inventor
Kouichirou Niguchi
Shiyouzou Tamura
Kazuo Kasuga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP3415978A priority Critical patent/JPS54127703A/en
Publication of JPS54127703A publication Critical patent/JPS54127703A/en
Pending legal-status Critical Current

Links

JP3415978A 1978-03-27 1978-03-27 Method of making photomask Pending JPS54127703A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3415978A JPS54127703A (en) 1978-03-27 1978-03-27 Method of making photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3415978A JPS54127703A (en) 1978-03-27 1978-03-27 Method of making photomask

Publications (1)

Publication Number Publication Date
JPS54127703A true JPS54127703A (en) 1979-10-03

Family

ID=12406415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3415978A Pending JPS54127703A (en) 1978-03-27 1978-03-27 Method of making photomask

Country Status (1)

Country Link
JP (1) JPS54127703A (en)

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