JPS54123875A - Dry etching method - Google Patents

Dry etching method

Info

Publication number
JPS54123875A
JPS54123875A JP3072978A JP3072978A JPS54123875A JP S54123875 A JPS54123875 A JP S54123875A JP 3072978 A JP3072978 A JP 3072978A JP 3072978 A JP3072978 A JP 3072978A JP S54123875 A JPS54123875 A JP S54123875A
Authority
JP
Japan
Prior art keywords
dry etching
etching method
dry
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3072978A
Other languages
Japanese (ja)
Inventor
Hiroshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP3072978A priority Critical patent/JPS54123875A/en
Publication of JPS54123875A publication Critical patent/JPS54123875A/en
Pending legal-status Critical Current

Links

JP3072978A 1978-03-17 1978-03-17 Dry etching method Pending JPS54123875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3072978A JPS54123875A (en) 1978-03-17 1978-03-17 Dry etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3072978A JPS54123875A (en) 1978-03-17 1978-03-17 Dry etching method

Publications (1)

Publication Number Publication Date
JPS54123875A true JPS54123875A (en) 1979-09-26

Family

ID=12311746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3072978A Pending JPS54123875A (en) 1978-03-17 1978-03-17 Dry etching method

Country Status (1)

Country Link
JP (1) JPS54123875A (en)

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