JPS5412373U - - Google Patents
Info
- Publication number
- JPS5412373U JPS5412373U JP8479377U JP8479377U JPS5412373U JP S5412373 U JPS5412373 U JP S5412373U JP 8479377 U JP8479377 U JP 8479377U JP 8479377 U JP8479377 U JP 8479377U JP S5412373 U JPS5412373 U JP S5412373U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8479377U JPS5412373U (ja) | 1977-06-29 | 1977-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8479377U JPS5412373U (ja) | 1977-06-29 | 1977-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5412373U true JPS5412373U (ja) | 1979-01-26 |
Family
ID=29007814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8479377U Pending JPS5412373U (ja) | 1977-06-29 | 1977-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5412373U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6272138A (ja) * | 1985-09-26 | 1987-04-02 | Hitachi Electronics Eng Co Ltd | 検査装置のウエハ位置決め保持装置 |
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1977
- 1977-06-29 JP JP8479377U patent/JPS5412373U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6272138A (ja) * | 1985-09-26 | 1987-04-02 | Hitachi Electronics Eng Co Ltd | 検査装置のウエハ位置決め保持装置 |