JPS54123110A - Production of siliconee ceramics - Google Patents

Production of siliconee ceramics

Info

Publication number
JPS54123110A
JPS54123110A JP2979178A JP2979178A JPS54123110A JP S54123110 A JPS54123110 A JP S54123110A JP 2979178 A JP2979178 A JP 2979178A JP 2979178 A JP2979178 A JP 2979178A JP S54123110 A JPS54123110 A JP S54123110A
Authority
JP
Japan
Prior art keywords
siliconee
ceramics
production
siliconee ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2979178A
Other languages
Japanese (ja)
Inventor
Kazuo Anzai
Tomitarou Kubo
Katsutoshi Yoneya
Hachirou Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2979178A priority Critical patent/JPS54123110A/en
Publication of JPS54123110A publication Critical patent/JPS54123110A/en
Pending legal-status Critical Current

Links

JP2979178A 1978-03-17 1978-03-17 Production of siliconee ceramics Pending JPS54123110A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2979178A JPS54123110A (en) 1978-03-17 1978-03-17 Production of siliconee ceramics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2979178A JPS54123110A (en) 1978-03-17 1978-03-17 Production of siliconee ceramics

Publications (1)

Publication Number Publication Date
JPS54123110A true JPS54123110A (en) 1979-09-25

Family

ID=12285809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2979178A Pending JPS54123110A (en) 1978-03-17 1978-03-17 Production of siliconee ceramics

Country Status (1)

Country Link
JP (1) JPS54123110A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61215259A (en) * 1985-03-19 1986-09-25 真空材料株式会社 Manufacture of silicon nitride target for sputtering
US5028346A (en) * 1987-07-28 1991-07-02 Champion Spark Plug Company Semi-conducting ceramic
US5366941A (en) * 1991-10-30 1994-11-22 Ngk Insulators, Ltd. Composite ceramics and their production process

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61215259A (en) * 1985-03-19 1986-09-25 真空材料株式会社 Manufacture of silicon nitride target for sputtering
JPH04948B2 (en) * 1985-03-19 1992-01-09 Shinku Zairyo Kk
US5028346A (en) * 1987-07-28 1991-07-02 Champion Spark Plug Company Semi-conducting ceramic
US5366941A (en) * 1991-10-30 1994-11-22 Ngk Insulators, Ltd. Composite ceramics and their production process

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