JPS54123110A - Production of siliconee ceramics - Google Patents
Production of siliconee ceramicsInfo
- Publication number
- JPS54123110A JPS54123110A JP2979178A JP2979178A JPS54123110A JP S54123110 A JPS54123110 A JP S54123110A JP 2979178 A JP2979178 A JP 2979178A JP 2979178 A JP2979178 A JP 2979178A JP S54123110 A JPS54123110 A JP S54123110A
- Authority
- JP
- Japan
- Prior art keywords
- siliconee
- ceramics
- production
- siliconee ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2979178A JPS54123110A (en) | 1978-03-17 | 1978-03-17 | Production of siliconee ceramics |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2979178A JPS54123110A (en) | 1978-03-17 | 1978-03-17 | Production of siliconee ceramics |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54123110A true JPS54123110A (en) | 1979-09-25 |
Family
ID=12285809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2979178A Pending JPS54123110A (en) | 1978-03-17 | 1978-03-17 | Production of siliconee ceramics |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54123110A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61215259A (en) * | 1985-03-19 | 1986-09-25 | 真空材料株式会社 | Manufacture of silicon nitride target for sputtering |
US5028346A (en) * | 1987-07-28 | 1991-07-02 | Champion Spark Plug Company | Semi-conducting ceramic |
US5366941A (en) * | 1991-10-30 | 1994-11-22 | Ngk Insulators, Ltd. | Composite ceramics and their production process |
-
1978
- 1978-03-17 JP JP2979178A patent/JPS54123110A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61215259A (en) * | 1985-03-19 | 1986-09-25 | 真空材料株式会社 | Manufacture of silicon nitride target for sputtering |
JPH04948B2 (en) * | 1985-03-19 | 1992-01-09 | Shinku Zairyo Kk | |
US5028346A (en) * | 1987-07-28 | 1991-07-02 | Champion Spark Plug Company | Semi-conducting ceramic |
US5366941A (en) * | 1991-10-30 | 1994-11-22 | Ngk Insulators, Ltd. | Composite ceramics and their production process |
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