JPS54122766U - - Google Patents
Info
- Publication number
- JPS54122766U JPS54122766U JP1830078U JP1830078U JPS54122766U JP S54122766 U JPS54122766 U JP S54122766U JP 1830078 U JP1830078 U JP 1830078U JP 1830078 U JP1830078 U JP 1830078U JP S54122766 U JPS54122766 U JP S54122766U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1830078U JPS54122766U (enExample) | 1978-02-15 | 1978-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1830078U JPS54122766U (enExample) | 1978-02-15 | 1978-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54122766U true JPS54122766U (enExample) | 1979-08-28 |
Family
ID=28845304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1830078U Pending JPS54122766U (enExample) | 1978-02-15 | 1978-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54122766U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6057611A (ja) * | 1983-08-09 | 1985-04-03 | Fujitsu Ltd | 分子線源シヤツタ |
| JPS6150326A (ja) * | 1984-08-20 | 1986-03-12 | Fujitsu Ltd | 半導体結晶成長装置 |
| JPS62177925A (ja) * | 1986-01-31 | 1987-08-04 | Hitachi Ltd | 表面処理方法 |
-
1978
- 1978-02-15 JP JP1830078U patent/JPS54122766U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6057611A (ja) * | 1983-08-09 | 1985-04-03 | Fujitsu Ltd | 分子線源シヤツタ |
| JPS6150326A (ja) * | 1984-08-20 | 1986-03-12 | Fujitsu Ltd | 半導体結晶成長装置 |
| JPS62177925A (ja) * | 1986-01-31 | 1987-08-04 | Hitachi Ltd | 表面処理方法 |