JPS54118081U - - Google Patents
Info
- Publication number
- JPS54118081U JPS54118081U JP1329978U JP1329978U JPS54118081U JP S54118081 U JPS54118081 U JP S54118081U JP 1329978 U JP1329978 U JP 1329978U JP 1329978 U JP1329978 U JP 1329978U JP S54118081 U JPS54118081 U JP S54118081U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1329978U JPS54118081U (fr) | 1978-02-07 | 1978-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1329978U JPS54118081U (fr) | 1978-02-07 | 1978-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54118081U true JPS54118081U (fr) | 1979-08-18 |
Family
ID=28831131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1329978U Pending JPS54118081U (fr) | 1978-02-07 | 1978-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54118081U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001510939A (ja) * | 1997-07-16 | 2001-08-07 | レール・リキード・ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 表面波プラズマでガスを励起する装置 |
-
1978
- 1978-02-07 JP JP1329978U patent/JPS54118081U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001510939A (ja) * | 1997-07-16 | 2001-08-07 | レール・リキード・ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 表面波プラズマでガスを励起する装置 |