JPS5411798B2 - - Google Patents

Info

Publication number
JPS5411798B2
JPS5411798B2 JP2274273A JP2274273A JPS5411798B2 JP S5411798 B2 JPS5411798 B2 JP S5411798B2 JP 2274273 A JP2274273 A JP 2274273A JP 2274273 A JP2274273 A JP 2274273A JP S5411798 B2 JPS5411798 B2 JP S5411798B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2274273A
Other languages
Japanese (ja)
Other versions
JPS48102076A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS48102076A publication Critical patent/JPS48102076A/ja
Publication of JPS5411798B2 publication Critical patent/JPS5411798B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32422—Arrangement for selecting ions or species in the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
JP2274273A 1972-03-06 1973-02-27 Expired JPS5411798B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH327572A CH565869A5 (en) 1972-03-06 1972-03-06

Publications (2)

Publication Number Publication Date
JPS48102076A JPS48102076A (en) 1973-12-21
JPS5411798B2 true JPS5411798B2 (en) 1979-05-17

Family

ID=4252464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2274273A Expired JPS5411798B2 (en) 1972-03-06 1973-02-27

Country Status (7)

Country Link
JP (1) JPS5411798B2 (en)
AT (1) AT319007B (en)
CH (1) CH565869A5 (en)
DE (1) DE2305359C3 (en)
FR (1) FR2174967B1 (en)
GB (1) GB1394655A (en)
NL (1) NL151137B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691437A (en) * 1979-12-26 1981-07-24 Nippon Hoso Kyokai <Nhk> Preparation of metallized element
GB2085482B (en) * 1980-10-06 1985-03-06 Optical Coating Laboratory Inc Forming thin film oxide layers using reactive evaporation techniques
JPS6115967A (en) * 1984-06-29 1986-01-24 Sumitomo Electric Ind Ltd Surface treatment
JPS61177366A (en) * 1985-01-31 1986-08-09 Sharp Corp Production of ultrafine particle dispersed substrate
US4888202A (en) * 1986-07-31 1989-12-19 Nippon Telegraph And Telephone Corporation Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film

Also Published As

Publication number Publication date
AT319007B (en) 1974-11-25
DE2305359A1 (en) 1973-09-13
FR2174967B1 (en) 1977-04-22
DE2305359B2 (en) 1975-07-17
NL151137B (en) 1976-10-15
NL7205592A (en) 1973-09-10
DE2305359C3 (en) 1980-01-10
FR2174967A1 (en) 1973-10-19
CH565869A5 (en) 1975-08-29
GB1394655A (en) 1975-05-21
JPS48102076A (en) 1973-12-21

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