JPS5411693A - Processig method for elastic surface wave substrate - Google Patents

Processig method for elastic surface wave substrate

Info

Publication number
JPS5411693A
JPS5411693A JP7614477A JP7614477A JPS5411693A JP S5411693 A JPS5411693 A JP S5411693A JP 7614477 A JP7614477 A JP 7614477A JP 7614477 A JP7614477 A JP 7614477A JP S5411693 A JPS5411693 A JP S5411693A
Authority
JP
Japan
Prior art keywords
processig
surface wave
elastic surface
wave substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7614477A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5636808B2 (enExample
Inventor
Sadao Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7614477A priority Critical patent/JPS5411693A/ja
Publication of JPS5411693A publication Critical patent/JPS5411693A/ja
Publication of JPS5636808B2 publication Critical patent/JPS5636808B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP7614477A 1977-06-28 1977-06-28 Processig method for elastic surface wave substrate Granted JPS5411693A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7614477A JPS5411693A (en) 1977-06-28 1977-06-28 Processig method for elastic surface wave substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7614477A JPS5411693A (en) 1977-06-28 1977-06-28 Processig method for elastic surface wave substrate

Publications (2)

Publication Number Publication Date
JPS5411693A true JPS5411693A (en) 1979-01-27
JPS5636808B2 JPS5636808B2 (enExample) 1981-08-26

Family

ID=13596793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7614477A Granted JPS5411693A (en) 1977-06-28 1977-06-28 Processig method for elastic surface wave substrate

Country Status (1)

Country Link
JP (1) JPS5411693A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61115314U (enExample) * 1985-06-25 1986-07-21
JP2003017983A (ja) * 2001-06-28 2003-01-17 Kyocera Corp 弾性波装置用ウエハ及びそれを用いた弾性波装置
JP2022068747A (ja) * 2020-10-22 2022-05-10 住友金属鉱山株式会社 酸化物単結晶ウエハ、複合基板用ウエハ、複合基板、酸化物単結晶ウエハの加工方法、酸化物単結晶ウエハの製造方法、複合基板用ウエハの製造方法および複合基板の製造方法
JP2022068748A (ja) * 2020-10-22 2022-05-10 住友金属鉱山株式会社 酸化物単結晶ウエハ、複合基板用ウエハ、複合基板、酸化物単結晶ウエハの加工方法、酸化物単結晶ウエハの製造方法、複合基板用ウエハの製造方法および複合基板の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353288A (en) * 1976-10-25 1978-05-15 Toshiba Corp Piezoelectric substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353288A (en) * 1976-10-25 1978-05-15 Toshiba Corp Piezoelectric substrate

Also Published As

Publication number Publication date
JPS5636808B2 (enExample) 1981-08-26

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