JPS54113511A - Vacuum unit - Google Patents

Vacuum unit

Info

Publication number
JPS54113511A
JPS54113511A JP2031878A JP2031878A JPS54113511A JP S54113511 A JPS54113511 A JP S54113511A JP 2031878 A JP2031878 A JP 2031878A JP 2031878 A JP2031878 A JP 2031878A JP S54113511 A JPS54113511 A JP S54113511A
Authority
JP
Japan
Prior art keywords
vacuum
container
sub
vacuum unit
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2031878A
Other languages
English (en)
Inventor
Nariyoshi Suki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP2031878A priority Critical patent/JPS54113511A/ja
Publication of JPS54113511A publication Critical patent/JPS54113511A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2031878A 1978-02-23 1978-02-23 Vacuum unit Pending JPS54113511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2031878A JPS54113511A (en) 1978-02-23 1978-02-23 Vacuum unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2031878A JPS54113511A (en) 1978-02-23 1978-02-23 Vacuum unit

Publications (1)

Publication Number Publication Date
JPS54113511A true JPS54113511A (en) 1979-09-05

Family

ID=12023772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2031878A Pending JPS54113511A (en) 1978-02-23 1978-02-23 Vacuum unit

Country Status (1)

Country Link
JP (1) JPS54113511A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4504194A (en) * 1982-05-24 1985-03-12 Varian Associates, Inc. Air lock vacuum pumping methods and apparatus
US5002464A (en) * 1987-04-16 1991-03-26 Lee Hyeong G Double buffer vacuum system
WO2004031439A3 (de) * 2002-09-30 2004-11-04 Infineon Technologies Ag Verfahren und prozessreaktor zur sequentiellen gasphasenabscheidung
JP2009052432A (ja) * 2007-08-24 2009-03-12 Tadashi Kamimura 真空排気幇助装置と真空排気幇助方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4504194A (en) * 1982-05-24 1985-03-12 Varian Associates, Inc. Air lock vacuum pumping methods and apparatus
US5002464A (en) * 1987-04-16 1991-03-26 Lee Hyeong G Double buffer vacuum system
WO2004031439A3 (de) * 2002-09-30 2004-11-04 Infineon Technologies Ag Verfahren und prozessreaktor zur sequentiellen gasphasenabscheidung
JP2009052432A (ja) * 2007-08-24 2009-03-12 Tadashi Kamimura 真空排気幇助装置と真空排気幇助方法

Similar Documents

Publication Publication Date Title
JPS54113511A (en) Vacuum unit
JPS5644589A (en) Manufacture of heat pipe
JPS544090A (en) X-ray tube
JPS5351556A (en) Manufacture of heat pipe
JPS51143485A (en) Vacuum wrapping device
JPS5323150A (en) Multi-chamber tank
JPS5395355A (en) Heating and heat-insulating container
JPS5435806A (en) Hot pressing method at static pressure
JPS5428012A (en) Vacuum valve fitting device for hermetic vessel
JPS51130915A (en) Oil exhausting device for a vacuum container
JPS526135A (en) Water sealed gas check valve device
JPS52145851A (en) Heat pump system
JPS5335889A (en) Pressure suppression device
JPS5364816A (en) Manufacturing process of a container to contain liquids of different kindswith diaphragm
JPS5292959A (en) Vacuum freezing dryer device
JPS54134293A (en) Coolant draining system
JPS544091A (en) X-ray tube
JPS5419001A (en) Drain recovery system
JPS5364197A (en) Nuclear fusion device
JPS5298476A (en) Radiation device
JPS5434169A (en) Manufacturing of refrigerator box
JPS5279759A (en) Multi-stage accelerating tube
JPS5397611A (en) Inserting apparatus for liquid transporting syphon tube
JPS5560675A (en) Air compression pump
JPS5322649A (en) Pipe send closing method of heating pipe