JPS54108687A - Method and device for optically checking surface - Google Patents

Method and device for optically checking surface

Info

Publication number
JPS54108687A
JPS54108687A JP1609378A JP1609378A JPS54108687A JP S54108687 A JPS54108687 A JP S54108687A JP 1609378 A JP1609378 A JP 1609378A JP 1609378 A JP1609378 A JP 1609378A JP S54108687 A JPS54108687 A JP S54108687A
Authority
JP
Japan
Prior art keywords
checking surface
optically checking
optically
checking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1609378A
Other languages
Japanese (ja)
Other versions
JPS597937B2 (en
Inventor
Tatsuo Hiroshima
Kenichi Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP1609378A priority Critical patent/JPS597937B2/en
Publication of JPS54108687A publication Critical patent/JPS54108687A/en
Publication of JPS597937B2 publication Critical patent/JPS597937B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1609378A 1978-02-14 1978-02-14 Optical surface inspection method and device Expired JPS597937B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1609378A JPS597937B2 (en) 1978-02-14 1978-02-14 Optical surface inspection method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1609378A JPS597937B2 (en) 1978-02-14 1978-02-14 Optical surface inspection method and device

Publications (2)

Publication Number Publication Date
JPS54108687A true JPS54108687A (en) 1979-08-25
JPS597937B2 JPS597937B2 (en) 1984-02-21

Family

ID=11906892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1609378A Expired JPS597937B2 (en) 1978-02-14 1978-02-14 Optical surface inspection method and device

Country Status (1)

Country Link
JP (1) JPS597937B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60209151A (en) * 1984-03-31 1985-10-21 Nuclear Fuel Ind Ltd Automatic apparatus for inspecting defect on peripheral side of cylindrical body such as nuclear fuel pellet
JPH064606U (en) * 1992-06-23 1994-01-21 古河電気工業株式会社 Surface inspection device for inspected objects

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60209151A (en) * 1984-03-31 1985-10-21 Nuclear Fuel Ind Ltd Automatic apparatus for inspecting defect on peripheral side of cylindrical body such as nuclear fuel pellet
JPH064606U (en) * 1992-06-23 1994-01-21 古河電気工業株式会社 Surface inspection device for inspected objects

Also Published As

Publication number Publication date
JPS597937B2 (en) 1984-02-21

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