JPS54108687A - Method and device for optically checking surface - Google Patents
Method and device for optically checking surfaceInfo
- Publication number
- JPS54108687A JPS54108687A JP1609378A JP1609378A JPS54108687A JP S54108687 A JPS54108687 A JP S54108687A JP 1609378 A JP1609378 A JP 1609378A JP 1609378 A JP1609378 A JP 1609378A JP S54108687 A JPS54108687 A JP S54108687A
- Authority
- JP
- Japan
- Prior art keywords
- checking surface
- optically checking
- optically
- checking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1609378A JPS597937B2 (en) | 1978-02-14 | 1978-02-14 | Optical surface inspection method and device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1609378A JPS597937B2 (en) | 1978-02-14 | 1978-02-14 | Optical surface inspection method and device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54108687A true JPS54108687A (en) | 1979-08-25 |
JPS597937B2 JPS597937B2 (en) | 1984-02-21 |
Family
ID=11906892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1609378A Expired JPS597937B2 (en) | 1978-02-14 | 1978-02-14 | Optical surface inspection method and device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS597937B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60209151A (en) * | 1984-03-31 | 1985-10-21 | Nuclear Fuel Ind Ltd | Automatic apparatus for inspecting defect on peripheral side of cylindrical body such as nuclear fuel pellet |
JPH064606U (en) * | 1992-06-23 | 1994-01-21 | 古河電気工業株式会社 | Surface inspection device for inspected objects |
-
1978
- 1978-02-14 JP JP1609378A patent/JPS597937B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60209151A (en) * | 1984-03-31 | 1985-10-21 | Nuclear Fuel Ind Ltd | Automatic apparatus for inspecting defect on peripheral side of cylindrical body such as nuclear fuel pellet |
JPH064606U (en) * | 1992-06-23 | 1994-01-21 | 古河電気工業株式会社 | Surface inspection device for inspected objects |
Also Published As
Publication number | Publication date |
---|---|
JPS597937B2 (en) | 1984-02-21 |
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