JPS5410828B2 - - Google Patents
Info
- Publication number
- JPS5410828B2 JPS5410828B2 JP9803676A JP9803676A JPS5410828B2 JP S5410828 B2 JPS5410828 B2 JP S5410828B2 JP 9803676 A JP9803676 A JP 9803676A JP 9803676 A JP9803676 A JP 9803676A JP S5410828 B2 JPS5410828 B2 JP S5410828B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9803676A JPS5323279A (en) | 1976-08-16 | 1976-08-16 | Mutual pitch cont rol device for parallelly arrayed plate elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9803676A JPS5323279A (en) | 1976-08-16 | 1976-08-16 | Mutual pitch cont rol device for parallelly arrayed plate elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5323279A JPS5323279A (en) | 1978-03-03 |
| JPS5410828B2 true JPS5410828B2 (en:Method) | 1979-05-10 |
Family
ID=14208812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9803676A Granted JPS5323279A (en) | 1976-08-16 | 1976-08-16 | Mutual pitch cont rol device for parallelly arrayed plate elements |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5323279A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57115245U (en:Method) * | 1981-01-09 | 1982-07-16 | ||
| JP2657185B2 (ja) * | 1988-07-19 | 1997-09-24 | 東京エレクトロン株式会社 | ピッチ変換機及びそれを用いたピッチ変換方法 |
| JP2569052Y2 (ja) * | 1992-09-05 | 1998-04-22 | コマツ電子金属株式会社 | ウェーハ装填用ガイド |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5238902Y2 (en:Method) * | 1972-12-23 | 1977-09-03 |
-
1976
- 1976-08-16 JP JP9803676A patent/JPS5323279A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5323279A (en) | 1978-03-03 |