JPS5410827B2 - - Google Patents

Info

Publication number
JPS5410827B2
JPS5410827B2 JP9425276A JP9425276A JPS5410827B2 JP S5410827 B2 JPS5410827 B2 JP S5410827B2 JP 9425276 A JP9425276 A JP 9425276A JP 9425276 A JP9425276 A JP 9425276A JP S5410827 B2 JPS5410827 B2 JP S5410827B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9425276A
Other languages
Japanese (ja)
Other versions
JPS5319765A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9425276A priority Critical patent/JPS5319765A/ja
Publication of JPS5319765A publication Critical patent/JPS5319765A/ja
Publication of JPS5410827B2 publication Critical patent/JPS5410827B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9425276A 1976-08-06 1976-08-06 Irradiation method of x-rays Granted JPS5319765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9425276A JPS5319765A (en) 1976-08-06 1976-08-06 Irradiation method of x-rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9425276A JPS5319765A (en) 1976-08-06 1976-08-06 Irradiation method of x-rays

Publications (2)

Publication Number Publication Date
JPS5319765A JPS5319765A (en) 1978-02-23
JPS5410827B2 true JPS5410827B2 (ro) 1979-05-10

Family

ID=14105096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9425276A Granted JPS5319765A (en) 1976-08-06 1976-08-06 Irradiation method of x-rays

Country Status (1)

Country Link
JP (1) JPS5319765A (ro)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6223550Y2 (ro) * 1979-11-19 1987-06-16

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4882778A (ro) * 1972-01-14 1973-11-05
JPS50120270A (ro) * 1974-02-15 1975-09-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4882778A (ro) * 1972-01-14 1973-11-05
JPS50120270A (ro) * 1974-02-15 1975-09-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6223550Y2 (ro) * 1979-11-19 1987-06-16

Also Published As

Publication number Publication date
JPS5319765A (en) 1978-02-23

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