JPS54103397A - Production of semiconductor gas detecting element - Google Patents

Production of semiconductor gas detecting element

Info

Publication number
JPS54103397A
JPS54103397A JP1027678A JP1027678A JPS54103397A JP S54103397 A JPS54103397 A JP S54103397A JP 1027678 A JP1027678 A JP 1027678A JP 1027678 A JP1027678 A JP 1027678A JP S54103397 A JPS54103397 A JP S54103397A
Authority
JP
Japan
Prior art keywords
gas
sensitivity
sno
burned
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1027678A
Other languages
Japanese (ja)
Inventor
Shigekazu Kusanagi
Shigeo Akiyama
Hideo Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP1027678A priority Critical patent/JPS54103397A/en
Publication of JPS54103397A publication Critical patent/JPS54103397A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To enhance the gas responding characteristic with increasing the mechanical strength, by burning SnO2, a main component of element, at a specified temperature.
CONSTITUTION: Powder of metal Sn is gradually added to high purity nitric acid, and is caused to react at a reaction temperature of 75 to 85°C. The obtained precipitate is cleaned in refined water and dried. The dried matter is then temporarily burned at 600°C and crushed. Thus obtained powder of SnO2 has a Pt wire electrode embedded, and formed into a proper shape, and is burned in an electric oven at 1300 to 1500°C. Thus, the material may be used at temperatures 500 to 700°C, so that the desorption speed of gas may be increased, resulting in higher response speed thereof, thereby eliminating deterioration of sensitivity due to deposit of oil mist or the like. In addition, the gas sensitivity and the concentration separability may be enhanced, and the sensitivity to the humidity may be reduced because of high temperature, thereby minimizing malfunction.
COPYRIGHT: (C)1979,JPO&Japio
JP1027678A 1978-01-31 1978-01-31 Production of semiconductor gas detecting element Pending JPS54103397A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1027678A JPS54103397A (en) 1978-01-31 1978-01-31 Production of semiconductor gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1027678A JPS54103397A (en) 1978-01-31 1978-01-31 Production of semiconductor gas detecting element

Publications (1)

Publication Number Publication Date
JPS54103397A true JPS54103397A (en) 1979-08-14

Family

ID=11745782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1027678A Pending JPS54103397A (en) 1978-01-31 1978-01-31 Production of semiconductor gas detecting element

Country Status (1)

Country Link
JP (1) JPS54103397A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9849228B2 (en) 2011-07-29 2017-12-26 Fresenius Medical Care Deutschland Gmbh Method for determining at least one parameter of an extracorporeal blood circuit as well as apparatuses

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9849228B2 (en) 2011-07-29 2017-12-26 Fresenius Medical Care Deutschland Gmbh Method for determining at least one parameter of an extracorporeal blood circuit as well as apparatuses
US10744256B2 (en) 2011-07-29 2020-08-18 Fresnius Medical Care Deutschland Gmbh Method for determining at least one parameter of an extracorporeal blood circuit as well as apparatuses

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