JPS54101277A - Prober for semiconductor wafer - Google Patents

Prober for semiconductor wafer

Info

Publication number
JPS54101277A
JPS54101277A JP725078A JP725078A JPS54101277A JP S54101277 A JPS54101277 A JP S54101277A JP 725078 A JP725078 A JP 725078A JP 725078 A JP725078 A JP 725078A JP S54101277 A JPS54101277 A JP S54101277A
Authority
JP
Japan
Prior art keywords
circuit
output
incur
trq
pulse width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP725078A
Other languages
Japanese (ja)
Inventor
Shigeki Katsumi
Naoki Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP725078A priority Critical patent/JPS54101277A/en
Publication of JPS54101277A publication Critical patent/JPS54101277A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To stop the prober operation by discriminating the failure in incurring operation, through the detection of the output of the incur drive transistor, in the semiconductor wafer prober.
CONSTITUTION: Transistor TrQ is used for driving the incur 12. The voltage comparison circuit 3 to detect turning on or off of TrQ is present and it makes output when the collector voltage of TrQ is less than the reference voltage. The output of the one shot pulse generating circuit 4 detecting the minimum value of the pulse width for marking of incur from the output pulse width of the circuit 3, and that of the are shot pulse circuit 5 detecting the maximum value of the output pulse width of the circuit 3, are inputted to the FF circuit 8, and whether the leading of the voltage comparison output is in agreement with the data input or not is detected, performing to judge the incur drive pulse width by TrQ.
COPYRIGHT: (C)1979,JPO&Japio
JP725078A 1978-01-27 1978-01-27 Prober for semiconductor wafer Pending JPS54101277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP725078A JPS54101277A (en) 1978-01-27 1978-01-27 Prober for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP725078A JPS54101277A (en) 1978-01-27 1978-01-27 Prober for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS54101277A true JPS54101277A (en) 1979-08-09

Family

ID=11660769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP725078A Pending JPS54101277A (en) 1978-01-27 1978-01-27 Prober for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54101277A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935441A (en) * 1982-08-23 1984-02-27 Toshiba Corp Probing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935441A (en) * 1982-08-23 1984-02-27 Toshiba Corp Probing device

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