JPS54101277A - Prober for semiconductor wafer - Google Patents
Prober for semiconductor waferInfo
- Publication number
- JPS54101277A JPS54101277A JP725078A JP725078A JPS54101277A JP S54101277 A JPS54101277 A JP S54101277A JP 725078 A JP725078 A JP 725078A JP 725078 A JP725078 A JP 725078A JP S54101277 A JPS54101277 A JP S54101277A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- output
- incur
- trq
- pulse width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To stop the prober operation by discriminating the failure in incurring operation, through the detection of the output of the incur drive transistor, in the semiconductor wafer prober.
CONSTITUTION: Transistor TrQ is used for driving the incur 12. The voltage comparison circuit 3 to detect turning on or off of TrQ is present and it makes output when the collector voltage of TrQ is less than the reference voltage. The output of the one shot pulse generating circuit 4 detecting the minimum value of the pulse width for marking of incur from the output pulse width of the circuit 3, and that of the are shot pulse circuit 5 detecting the maximum value of the output pulse width of the circuit 3, are inputted to the FF circuit 8, and whether the leading of the voltage comparison output is in agreement with the data input or not is detected, performing to judge the incur drive pulse width by TrQ.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP725078A JPS54101277A (en) | 1978-01-27 | 1978-01-27 | Prober for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP725078A JPS54101277A (en) | 1978-01-27 | 1978-01-27 | Prober for semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54101277A true JPS54101277A (en) | 1979-08-09 |
Family
ID=11660769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP725078A Pending JPS54101277A (en) | 1978-01-27 | 1978-01-27 | Prober for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54101277A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5935441A (en) * | 1982-08-23 | 1984-02-27 | Toshiba Corp | Probing device |
-
1978
- 1978-01-27 JP JP725078A patent/JPS54101277A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5935441A (en) * | 1982-08-23 | 1984-02-27 | Toshiba Corp | Probing device |
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