JPS539508B2 - - Google Patents

Info

Publication number
JPS539508B2
JPS539508B2 JP4662671A JP4662671A JPS539508B2 JP S539508 B2 JPS539508 B2 JP S539508B2 JP 4662671 A JP4662671 A JP 4662671A JP 4662671 A JP4662671 A JP 4662671A JP S539508 B2 JPS539508 B2 JP S539508B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4662671A
Other versions
JPS4845179A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4662671A priority Critical patent/JPS539508B2/ja
Publication of JPS4845179A publication Critical patent/JPS4845179A/ja
Publication of JPS539508B2 publication Critical patent/JPS539508B2/ja
Expired legal-status Critical Current

Links

JP4662671A 1971-06-25 1971-06-25 Expired JPS539508B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4662671A JPS539508B2 (ja) 1971-06-25 1971-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4662671A JPS539508B2 (ja) 1971-06-25 1971-06-25

Publications (2)

Publication Number Publication Date
JPS4845179A JPS4845179A (ja) 1973-06-28
JPS539508B2 true JPS539508B2 (ja) 1978-04-06

Family

ID=12752487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4662671A Expired JPS539508B2 (ja) 1971-06-25 1971-06-25

Country Status (1)

Country Link
JP (1) JPS539508B2 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153872A (ja) * 1974-05-30 1975-12-11
JPS54762Y2 (ja) * 1975-04-03 1979-01-16
JPS5448486A (en) * 1977-09-26 1979-04-17 Matsushita Electric Ind Co Ltd Automatic measuring unit
JPS58103150A (ja) * 1981-12-16 1983-06-20 Matsushita Electric Ind Co Ltd 半導体基板の製造方法
JPS58103151A (ja) * 1981-12-16 1983-06-20 Matsushita Electric Ind Co Ltd 半導体基板の検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583561A (en) * 1968-12-19 1971-06-08 Transistor Automation Corp Die sorting system
US3584741A (en) * 1969-06-30 1971-06-15 Ibm Batch sorting apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583561A (en) * 1968-12-19 1971-06-08 Transistor Automation Corp Die sorting system
US3584741A (en) * 1969-06-30 1971-06-15 Ibm Batch sorting apparatus

Also Published As

Publication number Publication date
JPS4845179A (ja) 1973-06-28

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