JPS539508B2 - - Google Patents
Info
- Publication number
- JPS539508B2 JPS539508B2 JP4662671A JP4662671A JPS539508B2 JP S539508 B2 JPS539508 B2 JP S539508B2 JP 4662671 A JP4662671 A JP 4662671A JP 4662671 A JP4662671 A JP 4662671A JP S539508 B2 JPS539508 B2 JP S539508B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4662671A JPS539508B2 (ja) | 1971-06-25 | 1971-06-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4662671A JPS539508B2 (ja) | 1971-06-25 | 1971-06-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4845179A JPS4845179A (ja) | 1973-06-28 |
JPS539508B2 true JPS539508B2 (ja) | 1978-04-06 |
Family
ID=12752487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4662671A Expired JPS539508B2 (ja) | 1971-06-25 | 1971-06-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS539508B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50153872A (ja) * | 1974-05-30 | 1975-12-11 | ||
JPS54762Y2 (ja) * | 1975-04-03 | 1979-01-16 | ||
JPS5448486A (en) * | 1977-09-26 | 1979-04-17 | Matsushita Electric Ind Co Ltd | Automatic measuring unit |
JPS58103150A (ja) * | 1981-12-16 | 1983-06-20 | Matsushita Electric Ind Co Ltd | 半導体基板の製造方法 |
JPS58103151A (ja) * | 1981-12-16 | 1983-06-20 | Matsushita Electric Ind Co Ltd | 半導体基板の検査方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3583561A (en) * | 1968-12-19 | 1971-06-08 | Transistor Automation Corp | Die sorting system |
US3584741A (en) * | 1969-06-30 | 1971-06-15 | Ibm | Batch sorting apparatus |
-
1971
- 1971-06-25 JP JP4662671A patent/JPS539508B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3583561A (en) * | 1968-12-19 | 1971-06-08 | Transistor Automation Corp | Die sorting system |
US3584741A (en) * | 1969-06-30 | 1971-06-15 | Ibm | Batch sorting apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS4845179A (ja) | 1973-06-28 |