JPS5394943U - - Google Patents

Info

Publication number
JPS5394943U
JPS5394943U JP17852276U JP17852276U JPS5394943U JP S5394943 U JPS5394943 U JP S5394943U JP 17852276 U JP17852276 U JP 17852276U JP 17852276 U JP17852276 U JP 17852276U JP S5394943 U JPS5394943 U JP S5394943U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17852276U
Other languages
Japanese (ja)
Other versions
JPS5440452Y2 (ro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17852276U priority Critical patent/JPS5440452Y2/ja
Publication of JPS5394943U publication Critical patent/JPS5394943U/ja
Application granted granted Critical
Publication of JPS5440452Y2 publication Critical patent/JPS5440452Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17852276U 1976-12-29 1976-12-29 Expired JPS5440452Y2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17852276U JPS5440452Y2 (ro) 1976-12-29 1976-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17852276U JPS5440452Y2 (ro) 1976-12-29 1976-12-29

Publications (2)

Publication Number Publication Date
JPS5394943U true JPS5394943U (ro) 1978-08-02
JPS5440452Y2 JPS5440452Y2 (ro) 1979-11-28

Family

ID=28785739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17852276U Expired JPS5440452Y2 (ro) 1976-12-29 1976-12-29

Country Status (1)

Country Link
JP (1) JPS5440452Y2 (ro)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019001671A (ja) * 2017-06-12 2019-01-10 株式会社豊田中央研究所 金属蒸気供給装置、金属/金属化合物製造装置、金属窒化物単結晶の製造方法、及びナノ粒子の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019001671A (ja) * 2017-06-12 2019-01-10 株式会社豊田中央研究所 金属蒸気供給装置、金属/金属化合物製造装置、金属窒化物単結晶の製造方法、及びナノ粒子の製造方法

Also Published As

Publication number Publication date
JPS5440452Y2 (ro) 1979-11-28

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