JPS539487A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS539487A
JPS539487A JP8347176A JP8347176A JPS539487A JP S539487 A JPS539487 A JP S539487A JP 8347176 A JP8347176 A JP 8347176A JP 8347176 A JP8347176 A JP 8347176A JP S539487 A JPS539487 A JP S539487A
Authority
JP
Japan
Prior art keywords
semiconductor device
isolating grooves
eliminate
filling
silica film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8347176A
Other languages
Japanese (ja)
Inventor
Hideaki Uchida
Kenji Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8347176A priority Critical patent/JPS539487A/en
Publication of JPS539487A publication Critical patent/JPS539487A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To eliminate the protrusions around isolating grooves and prevent wiring disconnection by filling a silica film in the isolating grooves.
COPYRIGHT: (C)1978,JPO&Japio
JP8347176A 1976-07-15 1976-07-15 Semiconductor device Pending JPS539487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8347176A JPS539487A (en) 1976-07-15 1976-07-15 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8347176A JPS539487A (en) 1976-07-15 1976-07-15 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS539487A true JPS539487A (en) 1978-01-27

Family

ID=13803371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8347176A Pending JPS539487A (en) 1976-07-15 1976-07-15 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS539487A (en)

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