JPS5393135A - Evaporation device - Google Patents

Evaporation device

Info

Publication number
JPS5393135A
JPS5393135A JP774177A JP774177A JPS5393135A JP S5393135 A JPS5393135 A JP S5393135A JP 774177 A JP774177 A JP 774177A JP 774177 A JP774177 A JP 774177A JP S5393135 A JPS5393135 A JP S5393135A
Authority
JP
Japan
Prior art keywords
evaporation device
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP774177A
Other languages
Japanese (ja)
Other versions
JPS597782B2 (en
Inventor
Masachika Narushima
Akihiro Tomosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP774177A priority Critical patent/JPS597782B2/en
Publication of JPS5393135A publication Critical patent/JPS5393135A/en
Publication of JPS597782B2 publication Critical patent/JPS597782B2/en
Expired legal-status Critical Current

Links

JP774177A 1977-01-28 1977-01-28 Vapor deposition equipment Expired JPS597782B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP774177A JPS597782B2 (en) 1977-01-28 1977-01-28 Vapor deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP774177A JPS597782B2 (en) 1977-01-28 1977-01-28 Vapor deposition equipment

Publications (2)

Publication Number Publication Date
JPS5393135A true JPS5393135A (en) 1978-08-15
JPS597782B2 JPS597782B2 (en) 1984-02-21

Family

ID=11674118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP774177A Expired JPS597782B2 (en) 1977-01-28 1977-01-28 Vapor deposition equipment

Country Status (1)

Country Link
JP (1) JPS597782B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5746634A (en) * 1996-04-03 1998-05-05 The Regents Of The University Of California Process system and method for fabricating submicron field emission cathodes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5746634A (en) * 1996-04-03 1998-05-05 The Regents Of The University Of California Process system and method for fabricating submicron field emission cathodes

Also Published As

Publication number Publication date
JPS597782B2 (en) 1984-02-21

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