JPS5393135A - Evaporation device - Google Patents
Evaporation deviceInfo
- Publication number
- JPS5393135A JPS5393135A JP774177A JP774177A JPS5393135A JP S5393135 A JPS5393135 A JP S5393135A JP 774177 A JP774177 A JP 774177A JP 774177 A JP774177 A JP 774177A JP S5393135 A JPS5393135 A JP S5393135A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation device
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP774177A JPS597782B2 (en) | 1977-01-28 | 1977-01-28 | Vapor deposition equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP774177A JPS597782B2 (en) | 1977-01-28 | 1977-01-28 | Vapor deposition equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5393135A true JPS5393135A (en) | 1978-08-15 |
JPS597782B2 JPS597782B2 (en) | 1984-02-21 |
Family
ID=11674118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP774177A Expired JPS597782B2 (en) | 1977-01-28 | 1977-01-28 | Vapor deposition equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS597782B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5746634A (en) * | 1996-04-03 | 1998-05-05 | The Regents Of The University Of California | Process system and method for fabricating submicron field emission cathodes |
-
1977
- 1977-01-28 JP JP774177A patent/JPS597782B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5746634A (en) * | 1996-04-03 | 1998-05-05 | The Regents Of The University Of California | Process system and method for fabricating submicron field emission cathodes |
Also Published As
Publication number | Publication date |
---|---|
JPS597782B2 (en) | 1984-02-21 |
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